Sumco Corporation

Japan Super Quartz Corporation

Takuma Yoshioka

Toshiaki Sudo

Ken Kitahara

Masaki Morikawa

Koichi Suzuki

Hiroshi Kishi

Shinsuke Yamazaki

Tadahiro Sato

Takeshi Fujita

Minoru Kanda

Masaru Sato

A silica glass crucible includes a cylindrical side wall portion, a curved bottom portion, and a corner portion that is provided between the side wall portion and the bottom portion and has a higher curvature than a curvature of the bottom portion, in which a first region provided from a crucible inner surface to a middle in a thickness direction, a second region that is provided outside the first region in the thickness direction and has a different strain distribution from the first region, and a third region that is provided outside the second region in the thickness direction and up to the crucible outer surface and has a different strain distribution from the second region, are provided, and internal residual stresses of the first region and the third region are compressive stresses, whereas an internal residual stress of the second region includes a tensile stress.

Silica glass crucible

Buckling of a vitreous silica crucibleor inward fall of a sidewallis effectively suppressed. The vitreous silica crucibleincludes the cylindrical sidewallhaving an upward-opening rim, a mortar-shaped bottomincluding a curve, and a round portionconnecting the sidewalland the bottom. In the vitreous silica cruciblethe per-unit area thermal resistance in the thickness direction of the sidewallis higher than that of the round portion

A method of manufacturing a composite crucible includes: supplying mullite material powder to an upper region of a mold, and supplying second silica powder to a lower region provided below the upper region while rotating the mold; supplying third silica powder on an inner surface side of a layer made of the mullite material powder and the second silica powder; heating and fusing the mullite material powder, the second silica powder, and the third silica powder to form an opaque vitreous silica layer provided on the outer surface of the crucible, a transparent vitreous silica layer provided on an inner surface side of the crucible, and a mullite reinforcement layer provided on the outer surface side of an upper end portion of the crucible.

Method of manufacturing composite crucible

The present invention provides a method of manufacturing a vitreous silica crucible having a transparent layer by use of waste vitreous silica. According to the present invention, there is provided a method of manufacturing a vitreous silica crucible for manufacturing a monocrystalline or polycrystalline silicon ingot, including a process of vitrifying a silica powder sintered body having a crucible shape in the whole or part of the thickness direction by arc fusing the silica powder sintered body from the inner surface side, wherein the method further includes at least one means of (1) depressurizing the silica powder sintered body from the outer surface side during the arc fusing, and (2) forming a synthetic vitreous silica layer on the inner surface by spraying synthetic silica powder onto the inner surface of the silica powder sintered body during the arc fusing.

Method of manufacturing vitreous silica crucible, vitreous silica crucible

The present invention provides a method of manufacturing a vitreous silica crucible having a transparent layer by use of waste vitreous silica, and silica powder suitable for the manufacturing. According to the present invention, there is provided a method of manufacturing granulated silica powder comprising a process for pulverizing waste vitreous silica generated in the manufacturing process of a crucible to form silica fine powder having an average particle diameter of 100 &#x3bc;m or less, and a process for granulating the silica fine powder to obtain granulated silica powder having an average particle diameter of 50 &#x3bc;m or more under helium atmosphere.

Method of manufacturing granulated silica powder, method of manufacturing vitreous silica crucible

The purpose of the present invention is to provide a crucible which has high viscosity at high temperature, can be used for a long time, and can be manufactured at low cost, and a method of manufacturing the crucible. The present invention provides a composite crucible including a vitreous silica crucible body having a sidewall portion and a bottom portion, and a reinforcement layer provided on an outer surface side of an upper end portion of the vitreous silica crucible body, wherein the reinforcement layer is made of mullite material whose main component is alumina and silica.

Composite crucible and method of manufacturing the same

The purpose of the present invention is to provide a crucible which has high viscosity at high temperature, and can be used for a long time, and can be manufactured at low cost, and a method of manufacturing the same. The composite crucibleis characterized in the use of mullite (3AlO.2SiO) as the basic material of the crucible. The composite cruciblehas the crucible bodymade of mullite material whose main component is alumina and silica, and a transparent vitreous silica layerformed on the inner surface of the crucible body. The thickness of the transparent vitreous silica layeris smaller than that of the crucible body. The crucible bodycan be formed by the slip casting method, and the transparent vitreous silica layercan be formed by the thermal spraying method.

Composite crucible, method of manufacturing the same, and method of manufacturing silicon crystal

There is provided a method of manufacturing a vitreous silica crucible having non-bubbles on the inner surface without necessitating new apparatuses for grinding and polishing and without damaging the productivity. According to the present invention, there is provided a method of manufacturing a vitreous silica crucible including the processes of: gathering a vitreous silica layer containing residual bubbles existing in a near-surface region of the transparent layer of the vitreous silica crucible by controlling the number of rotations applied to the vitreous silica crucible in a state that an inner surface side of the vitreous silica crucible is fused by arc heating; and moving a portion of a non-bubble layer in the surface of the transparent layer exposed by movement of the residual bubble-containing layer to cover a region in which bubbles have gathered with the non-bubble layer.

Method of manufacturing vitreous silica crucible

A mold for the production of a silica crucible by heat-fusing silica or quartz powder attached onto an inner wall of a rotating mold, wherein a ring-shaped heat insulating barrier material having a specified inner diameter is disposed on an inner peripheral wall of an upper opening portion of the mold corresponding to an upper region of the silica crucible.

Mold for producing a silica crucible

In a mold for use in the production of a silica crucible, a mold cover corresponding to a small-diameter thinned portion of an upper part of the silica crucible is detachably disposed on a mold substrate corresponding to a main body of the silica crucible, and the mold cover has a barrier function against arc heating, and an inner diameter of the mold cover is smaller than that of the mold substrate but larger than that of the silica crucible.

Mold for producing silica crucible

There is provided a mold for use in the production of a silica crucible by heat-fusing silica or quartz powder attached onto an inner wall of a rotating mold, wherein an inner side of an upper opening portion of the mold corresponding to an upper part of the silica crucible is ground to obtain a step portion and a ring-shaped heat insulating barrier member having an inner diameter smaller than that of the mold is disposed on the step portion through a hollow disk-shaped support member having an inner diameter equal to or somewhat larger than that of the heat insulating barrier member.

In a mold for use in the production of a silica crucible, a cylindrical rim member is engagedly supported through hooks to an inner side of an upper opening portion of the mold corresponding to an upper part of a silica crucible and an outer diameter of the rim member is smaller than an inner diameter of the mold but larger than an inner diameter of the silica crucible.

Growing community of inventors

Akita, Japan

Takuma Yoshioka