Shin-etsu Chemical Co., Ltd.

Takuma Kushihashi

Noboru Kimura

Masaki Seki

Kazuhiro Yamaguchi

Akira Satoh

Kazuyoshi Tamura

Yukio Kurosawa

Mitsuhiro Kanai

Yoshihiko Shimizu

A three-dimensional ceramic heater, such as a cylindrical ceramic heater, is proposed in which the conductive ceramic heating element is multi-furcated into lanes at least in the folded-back sections so that the electric current tends to flow in a more uniform and hence laminar manner with the effect that the localized over heating is suppressed greatly.

Three-dimensional ceramic heater

There is disclosed a heating elementcomprising:

Heating element

There is disclosed a PBN container in which a conductive film is deposited on a surface of a body formed by depositing PBN (pyrolytic boron nitride), wherein, at least, an angle between a PBN cut face of the body and at least one wall surface adjacent to the PBN cut face is 20&#xb0;-80&#xb0;, and a method for producing a PBN (pyrolytic boron nitride) container comprising at least steps of depositing PBN to form a body, processing a PBN cut face of the formed body so that at least, an angle between the PBN cut face and at least one wall surface adjacent to the PBN cut face is 20&#xb0;-80&#xb0;, and coating a surface of the processed body with a conductive film. Thus, there can be provided a PBN container excellent in durability where a conductive film is laminated on a surface of a body formed by depositing PBN, and a method for producing the PBN container.

PBN container and method for producing PBN container

A ceramic heater including a plate member made of insulating ceramics in which one or more pair(s) of through-holes are formed, a rod member made of conductive ceramics with a power-supply terminal at one end. The rod member is inserted into the through hole in the plate member. A conductive layer made of conductive ceramics is formed on the plate member; and a coating layer made of insulating ceramics is formed on the conductive layer. One end face of the rod member has a same plane with a main surface of the plate member, the conductive layer has a heater pattern formed on the main surface of the plate member, and the rod members are electrically insulated not to be short-circuited to each other in the opposite main surface.

Ceramic heater and method for producing ceramic heater

A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra&#x2266;0.05 &#x3bc;m and Rmax&#x2266;0.6 &#x3bc;m, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

Heating apparatus having electrostatic adsorption function

There is disclosed a pyrolytic boron nitride container for accommodating a material serving as a source of molecular beams for molecular beam epitaxy, wherein the transmissivity of the pyrolytic boron nitride container with respect to light having a wave number of 2600 cm,to 6500 cm,has a profile such that the transmissivity changes in the height direction of the container. The pyrolytic boron nitride container can be manufactured through a simple process and at low cost. The pyrolytic boron nitride container can prevent material melt from rising along the inner wall surface and prevent splashed material melt from adhering to the upper portion of the container. Further, the pyrolytic boron nitride container can stabilize molecular beam epitaxial growth and improve the quality of epitaxial film.

Pyrolytic boron nitride container and manufacture thereof

There is disclosed a pyrolytic boron nitride container used for a Boat method in which material melt is retained In the container, and a crystal is grown while a temperature gradient is imparted to the material melt. The transmissivity of the pyrolytic boron nitride container with respect to light at a wave number ranging from 3700 cm.sup.-1 to 6500 cm.sup.-1 has a profile such that the transmissivity monotonously changes in the longitudinal direction of the container. The transmissivity profile is produced by imparting a pressure profile during manufacture of the container through deposition of pyrolytic boron nitride, by roughing the outer surface of the container such that the surface roughness has a profile, or by compounding pyrolytic boron nitride with a different material. It becomes possible to facilitate generation of a temperature gradient in material melt within the container and to facilitate control of a temperature profile in the container.

Pyrolytic boron nitride container, and manufacture thereof

A pyrolytic boron nitride crucible is disclosed which is suitable for producing a single crystal of a semiconductor compound of Group III and V by the LEC method. The crucible comprises a side part and a bottom part. The bottom part has an absorption coefficient of light of wavelengths between 3,700 cm.sup.-1 and 6,500 cm.sup.-1 of at most 1.7 and/or the absorption coefficient of light of wavelengths between 3,700 cm.sup.-1 to 6,500 cm.sup.-1 of the bottom part is less than that of the side part by at least 0.5. In the crucible, the heat conduction from the bottom part to material melt in the crucible is strengthened, so that the convection flow of the material melt is suppressed and the temperature distribution in the crucible can be easily controlled.

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Gunma, Japan

Takuma Kushihashi