Kabushiki Kaisha Topcon

Takuji Sato

Hisashi Isozaki

Ikuo Ishinabe

Takao Tanabe

Yutaka Shida

Yoshiyuki Enomoto

Hiroyuki Maekawa

Kazuhiro Omori

An ophthalmologic apparatus includes a two-dimensional scanning optical system, a refractive optical system, and a concave mirror. The two-dimensional scanning optical system deflects light from a light source in a first angle range. The refractive optical system deflects the light deflected by the two-dimensional scanning optical system in a second angle range that is wider than the first angle range. The concave mirror includes a reflective surface in at least part of the rotational symmetry surface, and reflects the light emitted from the refractive optical system. The exit-side optical axis of the refractive optical system substantially coincides with the rotational symmetry axis of the rotational symmetry surface. The pupil location in the refractive optical system and the exit focus of the concave mirror are located at optically conjugate positions or in the vicinity of the positions. The exit focus is located at a subject's eye position.

Ophthalmologic apparatus

A method for surface inspection, comprising the step of projecting at least two laser beams with different wavelengths to a same point to be inspected via a same projecting lens, the step of setting incident angles of the two laser beams so that fluctuations of values of reflectivity of the laser beams are complementary to each other, and the step of detecting reflected scattered light components.

Method and device for surface inspection

An apparatus for surface inspection according to the invention comprises an irradiating optical system for throwing an irradiating light beam from a light source onto the surface of an object of inspection, a light receiving optical system for receiving a scattered light beam reflected from the surface of the object of inspection irradiated by the irradiating optical system, a photosensing portion for forming a surface data signal from the scattered light beam received by the light receiving optical system, a displacement portion for displacing the surface of the object of inspection relative to the irradiating optical system, plus the light receiving optical system, continuously in the main scanning direction and intermittently in the sub-scanning direction, and a foreign matter detecting portion for detecting a foreign matter present on the surface of the object of inspection on the basis of the maximum value level of the surface data signal and obtaining the position, in the sub-scanning direction, of the foreign matter present on the surface of the object of inspection on the basis of at least two adjoining surface data signals in the sub-scanning direction.

Apparatus for surface inspection

Growing community of inventors

Suginami-ku, Japan

Takuji Sato