Ngk Insulators, Inc.

Takuji Kimura

Kazuhiro Nobori

Hidemi Nakagawa

Koji Kimura

Tetsuya Onogi

Yukihisa Takeuchi

Tsutomu Nanataki

Makoto Ohmori

Kunihiko Yoshioka

Katsuyuki Takeuchi

Hirokazu Nakanishi

Shuichiro Motoyama

Koichi Iwata

Reo Watanabe

Takahiro Takahashi

Masahito Eguchi

Toshiki Hiraiwa

Tomohisa Mizoguchi

A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.

Ceramic heater and method of manufacturing the same

A member for a semiconductor manufacturing apparatus includes a ceramic disc incorporating an electrode and a ceramic cylindrical shaft supporting the disc. The disc and the shaft are integrally formed and mutually have no bonding interface. The disc has a surface with which the shaft is integrated. The surface has a region inside the shaft and a region outside the shaft. The region inside the shaft is recessed by one step with respect to the region outside the shaft and has an electrode exposure hole through which the electrode is exposed.

Member for semiconductor manufacturing apparatus, method for manufacturing the same, and mold

A ceramic heater includes a ceramic plate. An outer-peripheral-side resistance heating element is disposed in an outer peripheral zone of the ceramic plate. A wire line extends from each of a pair of terminals disposed in a central portion of the ceramic plate toward the outer peripheral zone, and a portion of the wire line close to the outer peripheral zone is a linear portion. A connection terminal is a conductive member connecting between the wire line and the outer-peripheral-side resistance heating element, and includes a first hole into which the linear portion of the wire line is inserted and a second hole into which an end portion of the outer-peripheral-side resistance heating element is inserted.

Ceramic heater and manufacturing method for the same

A method of manufacturing a wafer mounting table according to an embodiment includes: (a) a step of loading a ceramic slurry containing a ceramic powder and a gelling agent into opening portions of a metal mesh, inducing a chemical reaction of the gelling agent to gelate the ceramic slurry, and then performing degreasing and calcining to prepare a ceramic-loaded mesh; (b) a step of sandwiching the ceramic-loaded mesh between a first ceramic calcined body and a second ceramic calcined body obtained by calcining after mold cast forming so as to prepare a multilayer body; and (c) a step of hot press firing the multilayer body to prepare the wafer-receiving table.

Method of manufacturing wafer mounting table

The electrostatic chuck includes a discoidal alumina ceramic substrate and a heater electrode and an electrostatic electrode embedded in the alumina ceramic substrate. The top surface of the alumina ceramic substrate is a wafer-mounting face. The heater electrode has a pattern, for example, of a single continuous line so as to realize electric wiring over the entire surface of the alumina ceramic substrate. Upon the application of a voltage, the heater electrode generates heat and heats the wafer W. The heater electrode is made of a complex oxide of titanium, aluminum, and magnesium (Ti&#x2014;Al&#x2014;Mg&#x2014;O) dispersed in molybdenum.

Ceramic heater, heater electrode, and method for manufacturing ceramic heater

A method for producing an electrostatic chuckincludes the steps of (a) pouring a ceramic slurry containing a ceramic powder, a solvent, a dispersant, and a gelling agent into a first molding diein which an electrostatic electrode precursoris removably attached to an inner surface of the first molding die, gelatinizing the ceramic slurry by causing a chemical reaction of the gelling agent, and then removing the first molding dieto prepare an embedded-electrode-containing ceramic molded bodyX in which the electrostatic electrode precursoris embedded in a first ceramic molded body; (b) preparing a second ceramic molded body; and (c) preparing a stacked calcined bodyusing the embedded-electrode-containing ceramic molded bodyX and the second ceramic molded body, and conducting hot-press firing of the stacked calcined body

Method for producing electrostatic chuck and electrostatic chuck

A method for manufacturing an alumina sintered body, according to the present invention, includes the steps of (a) obtaining a compact by putting a slurry containing an AlOpowder, a MgO powder, a MgFpowder, a solvent, a dispersing agent, and a gelatinizer into a mold, gelatinizing the slurry by a chemical reaction of the gelatinizer in the mold, and causing mold release, (b) obtaining a calcined body by drying the compact, performing degreasing, and further performing calcination, and (c) obtaining a ceramic sintered body by subjecting the calcined body to hot-press firing at 1,150&#xb0; C. to 1,350&#xb0; C. In the step (a), the AlOpowder having a purity of 99.9 percent by mass or more is used and 0.1 to 0.2 parts by mass of MgO powder and 0.13 parts by mass or less of MgFpowder relative to 100 parts by mass of AlOpowder are used.

Method for manufacturing alumina sintered body and alumina sintered body

An electrostatic chuckincludes a disc-shaped alumina ceramic base, and a heater electrodeand an electrostatic electrodethat are embedded in the alumina ceramic base. An upper surface of the alumina ceramic basefunctions as a wafer-receiving surface. The heater electrodeis formed in a pattern shape, for example, in the manner of a single brush stroke so as to be arranged over the entire surface of the alumina ceramic base. When a voltage is applied to the heater electrode, the heater electrodegenerates heat, and heats a wafer W. This heater electrodecontains TiSias a main component.

Ceramic heater and method for producing the same

A method for producing an electrostatic chuck includes the steps of (a) placing a ceramic slurry in a molding die, the ceramic slurry containing a ceramic powder, a solvent, a dispersing agent, and a gelling agent, gelatinizing the ceramic slurry in the molding die, and removing the molding die to obtain first and second ceramic molded bodies; (b) drying, debinding, and calcining the first and second molded bodies to obtain first and second ceramic calcined bodies; (c) printing an electrostatic electrode paste on a surface of one of the first and second ceramic calcined bodies to form an electrostatic electrode while assuming the first ceramic calcined body is to form a dielectric layer of an electrostatic chuck; and (d) superposing the first and second ceramic calcined bodies on each other to sandwich the electrostatic electrode and subjecting the first and second calcined bodies to hot-press firing.

A compact of a support-member divided-member, which has a shape formed by dividing a support member into two in the thickness direction so as to divide the fuel channel into two in the thickness direction, is manufactured by a gel cast method in which slurry is filled in a molding die. A compact of a fuel-side electrode and a compact of an electrolyte are successively stacked on the upper surface of the compact of the support-member divided-member, whereby a compact of a cell divided member is obtained. The two compacts of the cell divided member are bonded and sintered, whereby an SOFC cell (sintered body) in which an oxygen-side electrode is not formed is formed. A compact of the oxygen-side electrode is formed respectively on the upper and lower surfaces of the sintered body, and then, the compact of the oxygen-side electrode is sintered, whereby the SOFC cell is completed.

Manufacturing method of solid oxide fuel cell, and manufacturing method of compact of divided member of the cell

The invention provides a ceramic green sheet having plasticity, punching property, and sinterability of satisfactory levels as well as a low percent (heat) shrinkage. In the production of a ceramic slurry serving as a raw material of the sheet, ingredients thereof are mixed under such conditions that the functional group ratio (polyol to isocyanate) is 1.5/11.5 to 11.5/11.5; the urethane resin formed from isocyanate and polyol has a repeating-unit-based molecular weight of 290 to 988; and the ratio by weight of the urethane resin to a ceramic powder falls within a range of 4.5 to 10 parts by weight of the urethane resin with respect to 100 parts by weight of the ceramic powder. A ceramic green sheet having, in well balance, all of the properties (i.e., plasticity, punching property, sinterability, and (heat) shrinkage) required for facilitating subsequent processes such as mechanical working and firing can be provided.

Ceramic green sheet and method for producing the same

The ceramic slurry is prepared by mixing a ceramic powder, a solvent, a dispersion medium, an isocyanate, a polyol, and a catalyst for accelerating a urethane reaction between the isocyanate and the polyol. A temperature-sensitive catalyst, which substantially exhibits a catalyst function only within a specific temperature range including an active temperature and higher than room temperature, is used as the catalyst. In a solidifying and drying step performed after a molding step of the slurry at room temperature, the solidification/drying temperature is set to be a high temperature within the range (within the specific temperature range) relatively close to the active temperature of the temperature-sensitive catalyst, and this temperature is maintained. Thus, the catalyst function can sufficiently be exhibited under high temperature.

Ceramic green body and method for producing the same

The ceramic green sheet is formed by molding and drying 'a ceramic slurry containing a ceramic powder, an unreacted portion of an isocyanate, an unreacted portion of a polyol, a urethane resin that is produced by mixing isocyanate and polyol and serves as an organic binder, and a solvent', the ceramic slurry being prepared by mixing the ceramic powder, the isocyanate, the polyol, and the solvent. A thin sheet-like molded body is formed by printing a molded body of a paste, which is prepared by mixing a ceramic powder, an organic binder that is a resin not containing a hydroxyl group, and a solvent, on the ceramic green sheet, and by drying the resultant. A dry shrinkage percentage of the ceramic green sheet upon forming the thin sheet-like molded body thereon can significantly be reduced.

A method for controlling the shrinkage of ceramic formed bodies is provided, including performing a preliminary test to determine an average shrinkage of ceramic formed bodies made from test lots of a ceramic powder, and determining a linear correlation between the average shrinkage and measured amounts of the ground test lots removed from a ball mill during a specific milling time interval. A batch of the ceramic powder is then ground, an amount of the ground ceramic powder removed from the ball mill during the specific time interval is measured, and the linear correlation is used to estimate the shrinkage of a ceramic body made therefrom. The difference between a target shrinkage and the estimated shrinkage is determined, and one or more of the processing conditions used to form the ceramic body are changed to offset the difference.

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Kariya, Japan

Takuji Kimura