Rigaku Corporation

Takeyoshi Taguchi

Masaru Kuribayashi

Kazuyuki Tohji

Takuto Sakumura

Yasukazu Nakaye

Kazuyuki Matsushita

Yuji Tsuji

Koichi Kajiyoshi

Katsuhiko Ogiso

Takeo Tajima

Katsumi Tsukamoto

Noboru Osawa

Provided are a data processing apparatus a method of obtaining the characteristic of each pixel and a method of data processing, and a program. A data processing apparatusto correct X-ray intensity data measured by a pixel detector includes a characteristic storage unitto store the characteristic of each pixel in a specific detector, a correction table generation unitto apply a measurement condition input as that in measurement by a specific detector and a value expressing the characteristic of each pixel to an approximate formula expressing the count value of each pixel and to generate a correction table for the specific detector using the calculation result of the approximate formula, and a correction unitto correct the X-ray intensity data measured by the specific detector using the generated correction table.

Data processing apparatus, method of obtaining characteristic of each pixel and method of data processing, and program

An X-ray diffraction apparatus allows plural kinds of characteristic X-rays to be incident on a sample at the same time and thus allows X-ray diffraction measurement with the plural kinds of characteristic X-rays to be carried out at the same time. An X-ray tube includes an anode which has the first target region made of Co and the second target region made of Cu. The first and second target regions are sectioned in a direction (Z-direction) perpendicular to an X-ray take-off direction. Incident-side and receiving-side Z-direction-divergence restriction devices restrict the X-ray divergence in the Z-direction. An X-ray detector is position sensitive at least in the Z-direction and can detect separately a diffracted X-ray coming from the first sample region which is irradiated with the Co characteristic X-ray and another diffracted X-ray coming from the second sample region which is irradiated with the Cu characteristic X-ray. The detector may be a two-dimensional CCD sensor capable of executing a TDI operation.

X-ray diffraction apparatus

An X-ray analysis apparatus in which X-rays emitted from an X-ray source are applied to a sample and a two-dimensional CCD sensor detects the X-rays diffracted by the sample. The X-ray analysis apparatus includes a scan-moving means for scan-moving the two-dimensional CCD sensor in a plane, and a charge-transfer signal generating means for generating a charge-transfer signal in the CCD sensor, every time the CCD sensor is moved for a distance corresponding to the width of a pixel constituting the CCD sensor. Hence, the motion of the semiconductor X-ray detecting means and the generation of the charge-transfer signal are synchronized with each other to achieve time delay integration operation. Since the timing of transfer of electric charges in the CCD sensor is synchronized with scan-motion velocity of the CCD sensor, each pixel can accurately analyze the intensity of the X-ray diffracted at each diffraction angle.

X-ray analysis apparatus

An X-ray analysis apparatus is disclosed, in which X-rays emitted from an X-ray source are applied to a sample and a two-dimensional CCD sensor detects the X-rays diffracted by the sample. The X-ray analysis apparatus has a 2&#x3b8;-rotation drive and a program. The 2&#x3b8;-rotation drive moves the two-dimensional CCD sensor. The program is executed to control the motion of the CCD sensor. The 2&#x3b8;-rotation drive rotates the CCD sensor around &#x3c9;-axis that extends over the surface of the sample. The program synchronizes the transfer of charges in the CCD sensor with the motion of the CCD sensor driven by the 2&#x3b8;-rotation drive. Hence, data items for the same diffraction angle can be accumulated in the pixels of the two-dimensional CCD sensor. This achieves high-speed and high-sensitivity in detection of diffracted X-rays.

In a hot cathode of an X-ray tube of the kind having a thermoelectronic emitter supported by a heating element, the emitter is comprised of plural emitter regions separated from each other. Each emitter region has the largest measure less than 3 mm, so that no crack occurs on the thermoelectronic emitter. The hot cathode is comprised of a heating element made of glassy carbon and a thermoelectronic emitter supported by the heating element. The emitter is comprised of plural emitter regions made of sintered lanthanum hexaboride. The hot cathode can be produced as described below. The heating element with a thickness of 1 mm is formed, at its thermoelectron-emitting side, with four recesses each of which is 2.6 mm in length, 0.5 mm in width and 0.3 mm in depth. The recesses are filled with lanthanum hexaboride powder, which is then sintered to complete four emitter regions.

Hot cathode of X-ray tube

An X-ray condenser for condensing X-rays radiated from an X-ray source to a very small condensing spot is disclosed. X-rays from the X-ray source are formed to a parallel X-ray beam by a parallel type parabolic reflection mirror. The parallel X-ray beam is made monochromatic by an analyzing crystal and condensed to the condensing spot by a zone plate. The zone plate is constructed by alternately arranging a plurality of X-ray transmitting bands and a plurality of X-ray shielding bands and can condense the parallel X-ray beam to a very small focus point.

X-ray condenser and x-ray apparatus

An X-ray spectrometer having a curved crystal monochromator which diffracts a continuous X-ray beam from an X-ray source to produce a monochromatic X-ray beam. An angle of incidence of the continuous X-ray beam can be changed with respect to the monochromator so as to change the wavelength of the monochromatic X-ray beam which is focused on and taken out from a receiving slit. The X-ray source, the monochromator and the receiving slit must be positioned always on a Rowland circle. The X-ray source and the monochromator can be moved so that the angle of incidence changes, while the receiving slit remains always stationary and the direction of an X-ray path from the center of the monochromator to the receiving slit remains always constant. Such an X-ray spectrometer is usable as an X-ray irradiation system of XAFS (X-ray Absorption Fine Structure) apparatus so that XAFS measurements require no movement of the sample.

Growing community of inventors

Tachikawa, Japan

Takeyoshi Taguchi