Horiba Stec, Co., Ltd.

Taketoshi Ito

Masaki Inoue

In order to eliminate liquid accumulation occurring between a gas-liquid mixing part and a vaporization part to stably perform liquid feeding to the vaporization part and vaporization in the vaporization part, a liquid material vaporization apparatus includes: a gas-liquid mixing part adapted to mix a liquid material and gas to produce a gas-liquid mixture; and a vaporization part adapted to heat the gas-liquid mixture to vaporize the liquid material. In addition, the gas-liquid mixing part has a gas-liquid mixture lead-out pipe for leading out the gas-liquid mixture, the vaporization part has a heating flow path HS for heating the gas-liquid mixture, and a lead-out port of the gas-liquid mixture lead-out pipe is arranged in the heating flow path HS.

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Kyoto, Japan

Taketoshi Ito