Ebara Corporation

Takeshi Yoshioka

Masao Matsumura

Fumio Kondo

Masaaki Kajiyama

Hiroyuki Shinozaki

Satoshi Mori

Norio Kimura

Yukio Ikeda

Mutsumi Saito

Masayoshi Hirose

Katsuyuki Aoki

Yoichi Kanemitsu

Yuji Shirao

Katsuaki Usui

Tatsuya Nishimura

Akihiko Maezawa

Masaru Nakaniwa

Masato Eguchi

Noriyuki Takeuchi

A method by which irradiation treatment of an exhaust gas with electron beams can be performed in a more space- and energy efficient manner. The method in which an exhaust gas containing nitrogen oxides (NOx) is irradiated with electron beams so as to form by-products, which are then separated whereas the treated exhaust gas is liberated into air atmosphere, characterized in that electron beams are generated in such a way that they have a pulsed temporal and spatial shape within an electron beam generator, with the pulse frequency and duration being in the respective ranges of 10 Hz-100 kHz and 10.sup.-8 -10.sup.-5 second whereas the non-irradiation region lasts for a time interval of 10.sup.-5 -10.sup.-1 second.

Method of irradiation with electron beams

Three-phase alternating-current electric energy supplied from a primary power supply is supplied to first and second six-phase transformer-coupled rectifying circuits which are connected in cascade to each other. The first six-phase transformer-coupled rectifying circuit comprises three primary windings connected in delta, and the second six-phase transformer-coupled rectifying circuit comprises three primary windings connected in star, for producing respective output voltages which are .pi./6 out of phase with each other. The first and second six-phase transformer-coupled rectifying circuits, which are connected in cascade to each other, jointly provide a twelve-phase rectifying circuit which produces a reduced harmonic or ripple current in its output energy as compared with a six-phase transformer-coupled rectifying circuit. The two six-phase transformer-coupled rectifying circuits share a voltage applied to the power supply device, and hence may have lower requirements for withstanding a breakdown voltage.

DC power supply device with high voltage and large power handling

Magnetic levitation conveyor apparatus

A positioning system stops a transport car traveling along a transport path at a predetermined stop position. The system includes a pair of members coupled together by a magnetic attraction force. One of the members is disposed at the stop position, while the other of the members is disposed on the transport car, and at least one of the members is attached to the stop position or the transport car through a damper. Alternatively, the system may include two pairs of members coupled together by a magnetic attraction force, in which one of each pair of the members is disposed at the stop position, while the other of each pair of the members is disposed on the transport car, and one member of one of the pairs of members is attached to a guide mechanism which restricts a direction of movement of the one member attached to the guide mechanism caused by the action of magnetic attraction force between the members. Thereby, vibration of the transport car upon stoppage at the stop position is transmitted to the damper or guide mechanism and damped by damping action of the damper or frictional loss in the guide mechanism.

Positioning system with damped magnetic attraction stopping assembly

Substrate transportation system

Several vacuum process steps are applied to substrates such as a wafer using a vacuum container for storing and transporting the substrates under vacuum. The vacuum container comprises a container body having a main opening for inserting a substrate and taking out the substrate, a lid engageable with the container body for closing and sealing the main opening of the container body, and a gate provided on one of the container body and the lid for performing at least one of evacuating an interior of the vacuum container and raising the pressure of the interior of the vacuum container to ambient.

Vacuum processing system

Growing community of inventors

Kanagawa-ken, Japan

Takeshi Yoshioka