Average Co-Inventor Count = 10.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,341 patents)
1 patent:
1. 8475668 - Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein