Agc Inc.

Takeshi Tomizawa

Yuki Aoshima

Reo Usui

Hidefumi Odaka

Masayoshi Mizoguchi

Ryusuke Morita

Sotaro Nakamura

An electroconductive-film-coated substrate includes a glass substrate and an electroconductive film disposed on one main surface of the glass substrate. The electroconductive film has an inclined portion in a peripheral edge. A distance from a position in the inclined portion where a thickness of the electroconductive film is 10% of a film thickness of a center of the electroconductive film to an edge end of the glass substrate is 3.00 mm or less. A distance from an end of the inclined portion to the edge end of the glass substrate is longer than 0.00 mm.

Electroconductive-film-coated substrate and reflective mask blank

A substrate with conductive film includes a base material; and a film of a conductive metal oxide arranged on an upper part of the base material. The film includes, by a top plan view, a first region and a second region, the second region is configured of a same material as the first region, and an electric resistance of the second region is higher than an electric resistance of the first region. The second region includes a part configured by a plurality of cellular sections surrounded by a plurality of fine cracks. In the part, each fine crack has a width of 1 nm to 50 nm, and each cellular section has a largest measure of less than 10 &#x3bc;m.

Substrate with conductive film

Growing community of inventors

Chiyoda-ku, Japan

Takeshi Tomizawa