Kabushiki Kaisha Toshiba

Takeshi Shundo

Atsushi Fukumoto

Hajime Nagano

Fumiki Aiso

In one embodiment, a semiconductor manufacturing apparatus includes a belt supporting module including a first portion that is provided around a first axis, a second portion that is provided around a second axis different from the first axis, a third portion connecting the first and second portions, and a fourth portion connecting the first and second portions and positioned below the third portion. The apparatus further includes a belt provided on the belt supporting module, and configured to rotate around the first axis in a first direction and rotate around the second axis in a second direction reverse to the first direction. The apparatus further includes a wafer supporting module provided on the belt and configured to support a wafer. The apparatus further includes raw material feeding heads provided above the belt and configured to feed a raw material of a film to be formed on the wafer.

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Nagoya, Japan

Takeshi Shundo