Nikon Corporation

Fujitsu Corporation

Origin Company, Limited

Koki Company Limited

Takeshi Shirai

Hitoshi Ishizawa

Takao Kokubun

Atsunobu Murakami

Takashi Mori

Takayuki Suzuki

Naoto Ozawa

Noriyoshi Uchida

Mitsuyasu Furusawa

Arisa Shiraishi

Yukiko Hayashi

Wataru Yagi

Junji Aboshi

The present invention provides a solder paste free of reducing agents and activators, and a method for producing a soldered product in which the solder paste is used to achieve solder bonding. The solder paste for reducing gas of the present invention is a solder paste for reducing gas used together a reducing gas. The solder paste contains a solder powder; a thixotropic agent that is solid at normal temperature; and a solvent, and is free of reducing agents for removal of oxide films and free of activators for improvement of reducibility.

Solder paste for reduction gas, and method for producing soldered product

An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.

Optical element and exposure apparatus

A lithographic projection apparatus projects a pattern from a patterning device onto a substrate using a projection system and includes a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid. An element of the projection system through which the pattern is projected has, on a surface configured to be in contact with the liquid, a protective coating which is substantially insoluble in the liquid.

Optical element and projection exposure apparatus based on use of the optical element

A liquid immersion exposure apparatus includes a projection optical system (PL) which projects an image of a pattern onto a substrate (W) and a unit () which supplies a liquid () between an optical element () at the end of the projection optical system (PL) and the substrate (W). A corrosion-resistant film composed of an oxide is formed on the surface of the optical element () to prevent corrosion by the liquid (). Consequently, a desired performance of the projection optical system can be secured for a long time even where a full field exposure in the step-and-repeat manner or a scanning exposure in the step-and-scan manner is performed in a liquid-immersion state.

A multilayer antireflection film comprises a laminate consisting of an alternate stack of at least one low-refractive-index layer and at least one high-refractive-index layer, at least one of outermost layers in the laminate is a low-refractive-index layer, and the multilayer antireflection film has the antireflection effect for s-polarized light of a specific wavelength of not more than 250 nm incident to the low-refractive-index layer.

Multilayer antireflection film, optical member, and reduction projection exposure apparatus

Mirror for an ultraviolet laser and method

Multilayer antireflection coatings are disclosed for grazing incident ultraviolet light having a large angle of incidence. The coatings comprise, from the medium side, layers of high-refractive-index material alternating with layers of low-refractive-index material. Each layer of the high-refractive-index material has the same optical thickness, and each layer of the low-refractive-index material has the same optical thickness. The multilayer antireflection coatings are effective in preventing reflection of p-polarized light, from optical elements coated with such a coating, having a wavelength of 150 nm.ltoreq..lambda..ltoreq.250 nm in a range of angle of incidence of 70.degree..ltoreq..theta..ltoreq.80.degree..

Multilayer antireflection coatings for grazing ultraviolet incident light

Anti-reflective coatings for use on an optical substrate are disclosed having a low reflectance over a broad band of wavelengths in the ultraviolet range and exhibiting excellent 'laser durability.' The anti-reflective coatings comprise a layer of high-refractive index material situated between at least two layers of low-refractive index material. The layers of high- and low-refractive index material are laminated onto an optical substrate, such as glass or quartz. The anti-reflective coating minimizes the loss of light due to flares, ghosts, etc. Additionally, reflections are reduced over a broad range of incidence angles.

three layer anti-reflective coating for optical substrate

In an ultrasonic diagnostic apparatus, ultrasonic pulse beams are transmitted into an organism, ultrasonic waves reflected within the organism are received to obtain received signals, and an image is displayed in accordance with the received signals thus obtained. The ultrasonic diagnostic apparatus has a blood flow velocity arithmetic unit for extracting a Doppler transition component of the reflected ultrasonic waves in accordance with the received signals to evaluate a distribution of a velocity of a blood flow within the organism in accordance with the extracted Doppler transition component; a blood flow power arithmetic unit for extracting a Doppler transition component of the reflected ultrasonic waves in accordance with the received signals to evaluate a distribution of a power of a blood flow within the organism in accordance with the extracted Doppler transition component; and an image display unit for simultaneously displaying on a display screen a first image representative of a blood flow velocity distribution evaluated by said blood flow velocity arithmetic unit, and a second image representative of a blood flow power distribution evaluated by said blood flow power arithmetic unit.

Ultrasonic diagnostic apparatus

A mirror for, e.g, an excimer laser is disclosed having high reflectance for a broad band of wavelengths in the ultraviolet range exhibiting excellent adhesion and 'laser durability.' The mirror comprises a substrate formed from glass or a glass-like material, a dielectric film, and a metallic film, such as aluminum foil, positioned between the dielectric film and the substrate. The dielectric film includes alternating layers of high- and low-refractive index material. These alternating layers reduce the amount of incident light reaching the metallic film so that any damage to the metallic film caused by light is reduced, thereby increasing the laser durability of the mirror. The laser durability is also increased because the durability of the laminated dielectric film is generally superior to that of the metallic film used in prior-art metallic reflector mirrors.

Growing community of inventors

Yokohama, Japan

Takeshi Shirai