Seiko Epson Corporation

Takeshi Shimizu

Shuichi Wakabayashi

Makiko Hino

Kohei Yamada

Daisuke Ishida

Yasushi Mizoguchi

Akihiro Murata

Hirokazu Yamaga

Kei Kamakura

Shuich Wakabayashi

A laser interferometer includes a laser light source that emits laser light, an optical modulator which superimposes a modulation signal on the laser light using a vibrator driven by a drive signal, a photodetector that receives the laser light including a sample signal and the laser light including the modulation signal, and outputs a light receiving signal, an oscillator that generates a reference signal, an amplifier that outputs the drive signal from the reference signal, and a processor that extracts a frequency modulation component from the light receiving signal and the reference signal, outputs a preprocessing signal including the frequency modulation component, demodulates the sample signal from the preprocessing signal and the reference signal, outputs a correction signal based on an output signal depending on driving of the vibrator, and corrects the drive signal and the reference signal based on the correction signal.

Laser interferometer

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.

An optical scanning apparatus includes a MEMS substrate, a substrate fixing section to which the MEMS substrate is fixed, and an environment detection sensor that detects an environment factor associated with the mirror. The environment detection sensor is disposed in a position where the environment detection sensor overlaps with or is adjacent to the substrate fixing section but does not overlap with the MEMS substrate in a plan view viewed in a direction perpendicular to a surface of the MEMS substrate.

Optical scanning apparatus, three-dimensional measurement apparatus, and robot system

The image display apparatus includes a light attenuation section that reflects a portion of light emitted from a light source and a scanning section that scans the light reflected by the light attenuation section. The light attenuation section transmits a portion of light emitted from the light source. The light attenuation section has reflectance and transmittance and the reflectance is smaller than the transmittance. The image display apparatus further includes a light receiving element on which the light transmitted through the light attenuation section is incident. The image display apparatus also includes a control section that controls activation of the light source in accordance with detection results of the light receiving element.

Image display apparatus and head-mounted display

A three-dimensional measuring device is a three-dimensional measuring device that performs three-dimensional measurement of an object using a laser beam. The three-dimensional measuring device includes a laser emitter disposed in a movable section of a robot and configured to irradiate a region including the object with the laser beam, a laser emission controller configured to control driving of the laser emitter, an image capturing device configured to image the object, on which the laser beam is irradiated, and acquire image data, and a point cloud generator configured to generate, based on the image data, three-dimensional point cloud of the region including the object. The laser emitter includes a laser beam source and a diffuser configured to diffuse the laser beam emitted from the laser beam source.

Three-dimensional measuring device, controller, and robot system

An optical attenuator, when damaged, loses not only a light attenuation function but also part of an optical path shift function utilizing a refractive effect, and thus an optical path shift function in a normal state is lost. Thus, it is possible to diverts an optical path of modulate light, which is a laser beam, from a direction toward a mirror surface, that is, a direction toward the eye of an observer.

Head-mounted display and image display device

An optical scanner includes: a movable member having a light reflection portion and being configured to swing around a first axis; a frame body configured to swing around a second axis intersecting the first axis; a first shaft connecting the movable member and the frame body; a fixing member; a second shaft connecting the frame body and the fixing member; a first strain detection element disposed at the second shaft and detecting deformation of the second shaft; and a first signal processing unit to which a detection signal of the first strain detection element is input and which outputs a signal based on bending deformation of the second shaft.

Optical scanner, actuator, image display device, and head-mounted display

An optical scanner includes: a movable portion that is provided with a light reflection portion and is swingable around a first axis; a frame body portion that is swingable around a second axis; a first shaft portion that connects the movable portion and the frame body portion; a fixed portion; a second shaft portion that connects the frame body portion and the fixed portion; a strain detection element that is disposed in the second shaft portion to detect deformation of the second shaft portion; a first signal processing portion to which a detection signal of the strain detection element is input and that outputs a signal based on bending deformation of the second shaft portion; and a second signal processing portion to which a detection signal of the strain detection element is input and that outputs a signal based on torsional deformation of the second shaft portion.

A light scanning device includes a movable section having a light reflecting section adapted to reflect light, oscillating around an oscillation axis, and having a variable magnitude of a maximum deflection angle of the oscillating, and a detection section adapted to detect the maximum deflection angle of the movable section, and the detection section includes a light source adapted to emit light to the light reflecting section, a light receiving section adapted to receive reflected light, which is the light emitted from the light source and then reflected by the light reflecting section, and a displacement driving section adapted to change a position of the light source in accordance with the maximum deflection angle of the movable section.

Light scanning device and image forming device

A light scanning device includes: a movable section which has a light reflection section reflecting light and oscillates around an oscillating axis and in which a maximum deflection angle thereof is variable; and a detection section which detects the maximum deflection angle of the movable section, wherein the detection section includes a light source which irradiates light toward the light reflection section, a light-receiving section which receives reflected light of the light from the light source, reflected by the light reflection section, and a displacement drive section which changes a position of the light-receiving section in accordance with the maximum deflection angle of the movable section.

Light scanning device and image formation apparatus

An optical scanning projector includes: a raster scanning unit that draws an image in a drawing area on a display surface by scanning beams in a first direction on the display surface while scanning beams in a second direction on the display surface that is orthogonal to the first direction; and a vector scanning unit that draws an image by irradiating beams so as to sequentially form segments each connecting two different points positioned on the display surface.

Optical scanning projector with raster scanning unit and vector scanning unit

A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic.

Mirror device drive control apparatus and projector

A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic, includes: a drive section adapted to drive the mirror device with a drive signal; a detection section adapted to detect a displacement of a movable section of the mirror device, and to generate and then output a detection signal corresponding to the detection; and a start-up processing section adapted to perform a start-up process of the mirror device, wherein the start-up processing section detects a frequency of an envelope included in abnormal vibration of the movable section as a beat frequency fb based on the detection signal of the detection section, obtains a predetermined frequency fbased on a frequency f of the drive signal of the mirror device with which the beat frequency is detected and the beat frequency fb, and drives the mirror device again with the drive signal having the frequency f

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Chino, Japan

Takeshi Shimizu