Yokogawa Electric Corporation

Kabushiki Kaisha Toshiba

Takeshi Mishima

Takashi Yoshida

Hideo Horiuchi

Shigeto Iwai

Hiroshi Suzuki

Yuusaku Yoshida

Yoshimasa Iwata

A vibration transducer includes a silicon substrate, a first oxide film formed on the silicon substrate, an activation layer formed on the first oxide film, a second oxide film formed on the activation layer, a polysilicon layer formed on the second oxide film, and a substrate contact part. A vibrator, a vibrator electrode electrically conducted with the vibrator, a fixed electrode close to the vibrator and a vacuum chamber configured to surround the vibrator are formed in the activation layer. The polysilicon layer forms a shell. The substrate contact part is configured to electrically conduct the polysilicon layer and the silicon substrate, and is formed to continuously surround the vacuum chamber in a region, in which the vibrator, the vibrator electrode and the fixed electrode of the activation layer are not formed, of the activation layer.

Vibration transducer

A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole over the resonator, a second layer disposed over the first layer, the second layer covering a gap being positioned above the through-hole and being communicated with the through-hole, and a third layer covering the first layer and the second layer, and the third layer sealing the gap.

Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer

In the ruled line elimination apparatus of the present invention, the ruled line contacting a character or overlapping to the character is completely eliminated. First, a ruled line determination section determines existence area of the ruled line in the input image. Second, a ruled line elimination section determines continuous pixels consisting of the ruled line in the existence area, and eliminates the continuous pixels by unit of predetermined width, in which a direction of the predetermined width is perpendiculer to a directed of the ruled line.

Ruled line elimination apparatus and method

Growing community of inventors

Musahino, Japan

Takeshi Mishima