Sumitomo Heavy Industries Ion Technology Co., Ltd.

Sen Corporation

Panasonic Corporation

Takeshi Kurose

Masaki Ishikawa

Toshio Yumiyama

Hiroyuki Kariya

Takanori Yagita

Shiro Ninomiya

Akihiro Ochi

Noriyasu Ido

Yasuharu Okamoto

Tadanobu Kagawa

Yoshiaki Inda

An ion implantation method includes transporting ions to a wafer as an ion beam, causing the wafer to undergo wafer mechanical slow scanning and also causing the ion beam to undergo beam fast scanning or causing the wafer to undergo wafer mechanical fast scanning in a direction perpendicular to a wafer slow scanning direction, irradiating the wafer with the ion beam by using the wafer slow scanning in the wafer slow scanning direction and the beam fast scanning of the ion beam or the wafer fast scanning of the wafer in the direction perpendicular to the wafer slow scanning direction, measuring a two-dimensional beam shape of the ion beam before ion implantation into the wafer, and defining an implantation and irradiation region of the ion beam by using the measured two-dimensional beam shape to thereby regulate the implantation and irradiation region.

Ion implantation method and ion implantation apparatus

An ion implanter includes a high-voltage power supply, a control unit that generates a command signal controlling an output voltage of the high-voltage power supply, an electrode unit to which the output voltage is applied, and a measurement unit that measures an actual voltage applied to the electrode unit. The control unit includes a first generation section that generates a first command signal for allowing the high-voltage power supply to output a target voltage, a second generation section that generates a second command signal for complementing the first command signal so that the actual voltage measured by the measurement unit becomes or close to the target voltage, and a command section that brings to the high-voltage power supply a synthetics command signal which is produced by synthesizing the first command signal and the second command signal.

Ion implanter and method of controlling the same

An ion implantation apparatus includes a beam scanner, a beam measurement unit that is able to measure an ion irradiation amount distribution in a beam scanning direction at a wafer position, and a control unit that outputs a control waveform to the beam scanner for scanning an ion beam. The control unit includes an output unit that outputs a reference control waveform to the beam scanner, an acquisition unit that acquires the ion irradiation amount distribution measured for the ion beam scanned based on the reference control waveform from a beam measurement unit, and a generation unit that generates a correction control waveform by using the acquired ion irradiation amount distribution. The control unit outputs the correction control waveform so that the ion irradiation amount distribution becomes a target distribution and the ion irradiation amount distribution per unit time becomes a target value.

A vertical profile, a horizontal profile, and an integrated current value of an ion beam are measured by a plurality of stationary beam measuring instruments and a movable or stationary beam measuring device. At a beam current adjustment stage before ion implantation, a control device simultaneously performs at least one of adjustment of a beam current to a preset value of the beam current, adjustment of a horizontal beam size that is necessary to secure uniformity of the horizontal ion beam density, and adjustment of a vertical beam size that is necessary to secure the uniformity of the vertical ion implantation distribution on the basis of a measurement value of the stationary beam measuring instruments and the movable or stationary beam measuring device.

Ion implantation apparatus and control method thereof

An optical disk recording/reproducing apparatus for accurately determining optimum recording power of a laser beam even if medium deviations occurs, stabilizing recording quality, and realizing recording which hardly causes read inability error. In test recording, a laser drive () irradiates a laser beam to an optical disk () to record information while varying the recording power stepwise and reproduce the information stepwise recorded on the optical disk. A recorded state index value calculating unit () determines the value representing the index of the recorded state from the signal level of the reproduced information at each step. A smoothing calculating unit () performs smoothing calculation of the recorded state index value at each step. An optimum recording power determining unit () determines the optimum power by acquiring the optimum value from the recorded state index values at the steps after smoothing calculation to record information on the optical disk with the optimum power determined in recording.

Growing community of inventors

Ehime, Japan

Takeshi Kurose