Matsushita Electric Industrial Co., Ltd.

Panasonic Corporation

Matushita Electric Industrial Co., Ltd.

Takeshi Kamada

Hideo Torii

Ryoichi Takayama

Takashi Hirao

Satoru Fujii

Shigenori Hayashi

Isaku Kanno

Masatoshi Kitagawa

Eiji Fujii

Atsushi Tomozawa

Tohru Nakagawa

Hiroyuki Matsuba

Hiroaki Nakashima

Seishi Tomari

Kazunari Chikanawa

Munehiro Shibuya

Hidetaka Higashino

Kentaro Setsune

Kiyotaka Wasa

Kazuki Komaki

Masumi Hattori

Takashi Deguchi

Hideaki Adachi

Osamu Yamazaki

Akira Enokihara

Hiroki Moriwake

Shintaro Hara

Shigemi Kohiki

Shinichiro Hatta

Toshiyuki Matsunaga

Hiroshi Nishizato

An ink jet head unit including a head () in which a plurality of nozzle arrays () are formed. Each of the nozzle arrays has a number of nozzle holes, and ink can be ejected from the nozzle holes. The head () is mounted on the head base, and flat cables () are connected at one end to mounting parts (), which are interposed between a first pair of the nozzle arrays () and a second pair of the nozzle arrays (). The flat cables are flexibly formed by covering transmission wires with an insulation film. The flat cables are connected to the head to transmit ink ejection signals for driving the head.

Ink jet head unit and ink jet recording apparatus mounted with the same

Plural nozzle arrays of which each comprises plural nozzle holes () from which ink is ejected are arranged slantingly in a main scanning direction. A distance between a first arbitrary nozzle hole (-) and a second nozzle hole (-), in a nozzle array adjacent to the array to which this first nozzle hole (-) belongs, which is adjacent to the first nozzle hole (-), and a distance between the first nozzle hole (-) and a third nozzle hole (-), in the nozzle array to which the second nozzle hole (-) belongs, which is further adjacent to the first nozzle hole (-) are different from each other.

Nozzle head, line head using the same, and ink jet recording apparatus mounted with its line head

A lead content in a piezoelectric thin film () of a piezoelectric element () is made smaller as compared to stoichiometric composition. More specifically, the piezoelectric thin film () is made of lead zirconate titanate expressed as Pb(ZrTi)O(0&#x3c;s&#x3c;1) or lead-zirconate-titanate-based oxide expressed as (PbA)(ZrTiB)O(0&#x3c;s&#x3c;1, 0&#x3c;t&#x3c;1-s) where A is a substitutive metal ion in an A-site in the perovskite crystalline structure and B is a substitutive metal ion in a B-site in the perovskite crystalline structure. The value of x, which indicates a deficiency in Pb content in each composition, is more than 0 but not more than 0.15.

Piezoelectric element and method for manufacturing the same, and ink jet head and ink jet recording apparatus using the piezoelectric element

In a piezoelectric element, a cubic or tetragonal orientation control layer () is provided on a first electrode layer (), and formed on the orientation control layer () is a piezoelectric layer () having a rhombohedral or tetragonal crystalline structure and made of lead zirconate titanate to which a Pb-containing complex perovskite compound expressed by the chemical formula Pb(AB)Ohas been added in an amount that is from 1 mol % to 50 mol %. The piezoelectric layer () is formed so that the crystal grains thereof become columnar grains which extend in the thickness direction of the piezoelectric layer () and in which the ratio of the average cross-sectional diameter to the length is from 1/50 to 1/14.

Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus

An ink jet recording apparatus, which performs printing by ink ejection, includes a pressure chamber in which ink liquid is filled; a nozzle hole () which is formed so as to communicate with the pressure chamber; a piezoelectric element () which is formed on the pressure chamber, and deforms the pressure chamber by mechanical expansion and contraction, whereby pressure is generated in the pressure chamber and ink is ejected from the nozzle hole (); and a dew point control unit () which maintains a dew point in an atmosphere of the piezoelectric element () and the vicinity of the piezoelectric element at a lower value than a dew point in an environment where the ink jet recording apparatus is set. The dew point control unit () includes a compressor (), and an air drier () which dries compression gas from the compressor () and feeds it to the piezoelectric element.

Ink jet recording apparatus

A piezoelectric element includes a first electrode; a piezoelectric layered film composed of a first piezoelectric film formed on the first electrode film and a second piezoelectric film that is formed on the first piezoelectric film and is controlled in crystal orientation thereof by the first piezoelectric film; and a second electrode film formed on the second piezoelectric film. Each of the first and second piezoelectric films is an aggregate of columnar grains grown unidirectionally along a thickness direction of the piezoelectric layered film. A columnar grain of the second piezoelectric film has a larger cross-sectional diameter than a columnar grain of the first piezoelectric film. A ratio l/d of the thickness l of the piezoelectric layered film to the cross-sectional diameter d of the second piezoelectric film is not less than 20 and not more than 60.

Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same

In a piezoelectric element comprising a first electrodeprovided on a substrate, a piezoelectric materialprovided on the first electrodeand a second electrodeprovided on the piezoelectric material, the piezoelectric materialis configured so as to have a perovskite type crystal structure which is represented by a formula ABOand in which the main component for the A site is Pb and the main components for the B site are Zr, Ti and Pb, and configured so that a ratio of Pb atoms to all atoms in the B site is more than 3% and not more than 30%. Namely, the piezoelectric materialis formed so as to contain Pb excessively and the excess Pb atoms are activated to be Pbduring formation of the piezoelectric materialand then introduced into the B site.

Piezoelectric body, manufacturing method thereof, piezoelectric element having the piezoelectric body, inject head, and inject type recording device

To manufacture a compact and high-performance thin-film piezoelectric bimorph element at low cost, first and second piezoelectric thin films () are formed by sputtering on the both surfaces of a metal thin plate () which are opposing relation to each other along the thickness thereof, while the respective states of polarizations of the first and second piezoelectric thin films () are controlled. A pair of electrode films () are formed on the respective surfaces of the first and second piezoelectric thin films () opposite to the metal thin plate ().

Method for controlling a direction of polarization of a piezoelectric thin film

A piezoelectric thin film can achieve a large piezoelectric displacement. A chemical composition of the piezoelectric thin film is expressed by Pb(ZrTi)O(0.2&#x2266;a&#x2266;0.6 and 0.50&#x2266;x&#x2266;0.62). The crystal structure of the piezoelectric thin film is a mixture of a perovskite columnar crystal region () having an ionic defect in which a portion of the constitutive elements of an oxygen ion, a titanium ion, and a zirconium ion is missing and a perovskite columnar crystal region () of stoichiometric composition having no ionic defect. This configuration allows a residual compressive stress in the crystal to be relaxed by the perovskite columnar crystal region () having an ionic defect, thus achieving a large piezoelectric displacement (displacement amount).

PIEZOELECTRIC THIN FILM AND METHOD FOR PREPARATION THEOF, AND PIEZOELECTRIC ELEMENT HAVING THE PIEZOELECTRIC THIN FILM, INK-JET HEAD USING THE PIEZOELECTRIC ELEMENT, AND INK-JET RECORDING DEVICE HAVING THE INK-JET HEAD

There is provided an ink-jet head having ink outlets formed at a high density for use in an ink-jet recorder. The ink-jet head comprises ink outlets, compression chambers communicating with the ink outlets, and piezoelectric vibration sections, each being provided on a part of each of the compression chambers and including a piezoelectric film containing Pb, Ti and Zr, and electrodes provided on both sides of the piezoelectric film. The piezoelectric film comprises a first layer and a second layer which each have a perovskite structure and are formed in contact with each other, wherein the first layer is formed as a layer containing no Zr or as a layer containing a smaller amount of Zr than that contained in the second layer.

Ink-jet head

The invention provides a compact and high performance infrared radiation detector. The infrared radiation detector contains: a substrate; and at least two infrared radiation detector units selected from the group consisting of a pyroelectric infrared radiation detector unit, a resistive bolometer type infrared radiation detector unit and a ferroelectric bolometer type infrared radiation detector unit, the infrared radiation detector units being disposed on the same side of the substrate.

Infrared radiation detector and method of manufacturing the same

An acceleration sensor,comprises a longitudinal effect type detection unit,and a lateral effect type detection unit,The longitudinal effect type detection unit,comprises a longitudinal effect type piezoelectric element,comprising a piezoelectric body,of a thin film, an electrode,and an electrode,which is formed on a deposition substrate,serving also as a weight. The lateral effect type detection unit,is constituted by providing a lateral effect type piezoelectric element,comprising a piezoelectric body,of a thin film, an electrode,and an electrode,which is formed on the deposition substrate,and is cantilevered above a groovy recessed part,on a substrate,A detection circuit,detects an acceleration in a predetermined direction, based on an output of both the longitudinal effect type detection unit,and the lateral effect type detection unit,Consequently, it is possible to detect an acceleration in a predetermined direction and to make a wider dynamic range and a wider band.

Piezoelectric acceleration sensor and method of detecting acceleration and manufacturing method thereof

A method of manufacturing a small, light, highly accurate and inexpensive thin film sensor element is disclosed. The thin film sensor element comprises a sensor holding substrate having an opening part and a multilayer film structure adhered thereon. The multilayer film structure comprises a first electrode film, a second electrode film, and a piezoelectric dielectric oxide film present between the first and second electrode films. The method of manufacturing the thin film sensor element comprises the steps of: forming the multilayer film structure by forming the first electrode film having a (100) plane orientation on a surface of an alkali halide substrate, forming the piezoelectric dielectric oxide thereon, and forming the second electrode film on the piezoelectric dielectric oxide; adhering the multilayer film structure on the surface of the sensor holding substrate having the opening part; and dissolving and removing the alkali halide substrate with water.

Method of manufacturing a thin film sensor element

Temperature sensor element, temperature sensor having the same and

A method for fabricating a dielectric device including a capacitor, a pyroelectric infrared detector, and the like is disclosed. The method comprises the steps of etching a dielectric substance film formed on a substrate to form a predetermined pattern with an etchant comprised of hydrofluoric acid and an oxidizing agent, and removing residues resulting from the etching by treating the etched layer with a first treating solution containing a reducing agent and subsequently with a second treating solution containing an acid.

Growing community of inventors

Nara, Japan

Takeshi Kamada