Denso Corporation

Takeru Kanazawa

Minekazu Sakai

Shinji Kawano

Yoichi Okui

Kazuyuki Ono

Ryosuke Murayama

In a pressure/temperature sensor, a sensor circuit is held by a holding member inside a tube that is fixed to a pipe, and an introduction portion is provided in the holding member at an inner side of the pipe with respect to the sensor circuit. The introduction portion includes a plurality of blades having blade surfaces extending along a protrusion direction of the introduction portion with respect to the sensor circuit. The plurality of blades are arranged radially on a surface perpendicular to the protrusion direction, and angles defined by the blade surfaces of the adjacent blades are all acute angles. Thus, regardless of the angle at which the blade is attached with respect to the flow direction of the measuring medium, an acute-angled portion of any adjacent blades is directed to the flow direction of the measuring medium. Therefore, a pressure loss of the measuring medium can be reduced.

Pressure/temperature sensor with reduced pressure loss

A pressure sensor generates an electrical output according to a fluid pressure in a detection space applied to a diaphragm. The diaphragm is flexibly deformable in a thickness direction. The pressure sensor includes a pressure receiving recess defining the detection space and a protection film covering the pressure receiving recess. The protection film has a corner portion provided in an inner corner area of the pressure receiving recess and a thin film portion having a uniform thickness. The corner portion is located outside the diaphragm in an in-plane direction orthogonal to the thickness direction.

Pressure sensor including protective film to avoid adhesion of foreign material

A sensor device has a gyro sensor and an acceleration sensor. The gyro sensor has a fixed base portion formed in a rectangular frame shape. The acceleration sensor is formed in an inside space of the fixed base portion of the rectangular frame shape. The gyro sensor is formed in an outside space formed between the fixed base portion and an outer frame portion of a sensor base plate. The gyro sensor and the acceleration sensor are formed in one chip. As a result, the sensor device can be made smaller in size.

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Kariya, Japan

Takeru Kanazawa