Rigaku Corporation

Takeo Tajima

Takeyoshi Taguchi

An X-ray analysis apparatus is disclosed, in which X-rays emitted from an X-ray source are applied to a sample and a two-dimensional CCD sensor detects the X-rays diffracted by the sample. The X-ray analysis apparatus has a 2&#x3b8;-rotation drive and a program. The 2&#x3b8;-rotation drive moves the two-dimensional CCD sensor. The program is executed to control the motion of the CCD sensor. The 2&#x3b8;-rotation drive rotates the CCD sensor around &#x3c9;-axis that extends over the surface of the sample. The program synchronizes the transfer of charges in the CCD sensor with the motion of the CCD sensor driven by the 2&#x3b8;-rotation drive. Hence, data items for the same diffraction angle can be accumulated in the pixels of the two-dimensional CCD sensor. This achieves high-speed and high-sensitivity in detection of diffracted X-rays.

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Akiruno, Japan

Takeo Tajima