Kabushiki Kaisha Yaskawa Denki

Hitachi-Kokusai Electric Inc.

Takenori Oka

Manabu Okahisa

Yukio Hashiguchi

Shingo Ando

Shinji Murai

Takuya Fukuda

Toshiyuki Yamagishi

Takeomi Hidaka

Toyofumi Yuda

Masaaki Ueno

Masakazu Shimada

Yusuke Kinoshita

Akira Hayashida

Masato Itou

Itou Masato

A robot includes a body, a first arm, and a second arm. The first arm includes one joint, an adjacent joint that is adjacent to the one joint, and another adjacent joint that is adjacent to the adjacent joint. When the first arm is extended in a vertical orientation relative to the body, the one joint of the first arm has a rotation axis that is offset by a first distance in a first horizontal direction from a rotation axis of the adjacent joint of the first arm, and the another adjacent joint of the first arm has a rotation axis that is offset by a second distance in a second horizontal direction from the rotation axis of the adjacent joint of the first arm. The first horizontal direction is opposite to the second horizontal direction.

Robot

A robot system includes a robot arm, one or more actuators that are provided in the robot arm to drive the robot arm, a sensor unit that detects an external force applied to at least one of the robot arm and the actuators, and a controller that controls an operation of each of the actuators and limits a torque instruction value for each of the actuators on the basis of a detection result of the sensor unit.

Robot system, control device of robot, and robot control device

This drive apparatus includes a first rotation mechanism portion including a first driven gear portion rotated by a first drive gear portion rotating about a first axis and a second rotation mechanism portion including a second driven gear portion rotated by a second drive gear portion rotating about the first axis.

Drive apparatus and robot

A motor includes: a almost annular stator, a rotor arranged inside the annular ring of the stator for rotating about a central axis, a sensor for detecting the rotation of the rotor, and a sensor board for implementing the sensor. The sensor and the sensor board are arranged outside the stator in the direction along the central axis. The sensor is a reflection type light projecting/receiving sensor.

Rotating electrical machine

A stator includes: a stator core having an almost annular outer core and an inner core arranged inside the outer core; and a bobbin having a cylindrical body part around which a winding wire is wound and a flange part that is formed so as to rise up from the cylindrical body part, with a plurality of bent parts and an edge part.

Stator and rotating electrical machine

A robot according to an embodiment includes an arm, a strain sensor, one or more actuator, and a sensor fixing jig. The strain sensor includes a piezoelectric body that has a natural frequency higher than a natural frequency of a structural material forming the arm. The one or more actuators are provided in the arm to drive the arm. The sensor fixing jig is provided in a base of the actuator, among the actuators in the arm, closest to a base end of the arm. The strain sensor is provided in the sensor fixing jig.

Robot, robot system, robot control device, and state determining method

A robot includes an arm including a plurality of joints, arm members that form the arm, each arm member supporting a load, actuators that drive the joints and that are supported by the arm members, a load sensor embedded in at least one of the arm members to measure the load applied to the at least one of the arm members, a controller that controls movements of the actuators on the basis of a result of the measurement performed by the load sensor, and a wire hole through which a sensor line extend from a space inside the at least one of the arm members to a space inside the arm, the sensor line connecting the load sensor to the controller.

Robot with load sensor

A substrate processing apparatus comprises a processing chamber for storing a boat supporting multiple substrates and for processing the multiple substrates, a heater unit installed around the processing chamber for heating the substrates, and a coolant gas supply nozzle including a pipe section extending perpendicular to a main surface of the substrate supported in the boat stored in the processing chamber, and a spray hole formed on the pipe section for spraying coolant gas to at least two of the multiple substrates, wherein the coolant gas supply nozzle is formed so that the cross sectional area of the pipe section in the area where the spray hole is formed is larger than the total opening area of the spray hole.

Growing community of inventors

Fukuoka, Japan

Takenori Oka