Hitachi, Ltd.

Takemasa Iwasaki

Sadao Shimoyashiro

Hiroshi Kikuchi

Masahiro Watanabe

Tsutomu Takahashi

Haruo Ohya

Minoru Ikeda

Masao Sakata

Hiroto Nagatomo

Toyohide Hamada

Tsutomu Tsuyama

Hiroyuki Kawaji

An apparatus for carrying a variety of products for effectively processing and carrying plural kinds of works such as semiconductor wafers includes a plurality of processing stations for processing plural kinds of works, a carriage system for carrying plural kinds of works, and a transfer system for delivering works between the carriage system and a processing station. A method for carrying a variety of products is realized in which the carriage system simultaneously carries plural kinds of works between the plurality of processing stations and stops at a predetermined position of the transfer system, whereas the transfer system identifies and delivers the desired kind of work to and from the carriage system.

Method and apparatus for carrying a variety of products

An equipment is diagnosed by monitoring a career of operations of the equipment necessary for diagnosing the equipment and a condition of the equipment during the operation, monitoring information on equipment operations and information on variations in operation of the equipment having started operation for a data gathering purpose, selecting some of the gathered data, classifying the selected data based on rules, computing characteristics of variations in equipment state during the operation of the equipment and diagnosing the data on the basis of criterion references for the characteristics prescribed by the rules as an equipment diagnostic procedure.

Diagnostic support system and diagnostic system of equipment

The present invention provides a carrier jig for use in processing, transporting and stocking a wafer-like material used in manufacture processes of semiconductor products, and a semiconductor production system using the carrier jig. The carrier jig of the present invention comprises a holder for holding and storing therein one wafer, for example, and a container box for loading therein the holder. A mechanism for transferring wafers by the use of the carrier jig is provided in each process, with the result the period of production time can be shortened and the production speed can be enhanced.

Production system with order of processing determination

Production system using wafer-like carrier jig

Growing community of inventors

Yokohama, Japan

Takemasa Iwasaki