Tocalo Co., Ltd.

Takema Teratani

Yoshio Harada

Tatsuo Suizu

Hiroshi Sakurai

Kazumi Tani

Kenichiro Togoe

Tatsuya Hamaguchi

Shinya Miki

Yukimasa Saito

Kiyoshi Miyajima

This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Method for blackening white fluoride spray coating, and fluoride spray coating covered member having a blackened layer on its surface

For the purpose of solving problems inherent to a white AlOspray coating, i.e. drawbacks that the injury resistance, corrosion resistance, heat resistance, abrasion resistance and the like are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, there are proposed a spray coating member having excellent injury resistance and the like in which a surface of a substrate is covered with a colored AlOspray coating of a luminosity lower than grayish white, achromatic or chromatic color.

Spray coating member having excellent injury resistance and so on and method for producing the same

A member is obtained by forming a YOblack spray coating on a surface of a substrate or covering the surface of the substrate with a YOblack spray coating through an undercoat or a middle layer. This coating has good heat characteristics and is good in the resistance to damaging through a high hardness. The YOblack spray coating is produced by subjecting white YOpowdery material to a plasma spraying in an inert gas atmosphere containing substantially no oxygen or by forming a YOwhite spray coating and then irradiating an electron beam or a laser beam to this coating to melt at least a part of the white coating under heating to thereby smoothen denseness and blacken the surface of the coating.

[object Object]

A member for a semiconductor manufacturing apparatus comprises a steel substrate and a composite oxide film formed on a surface thereof and comprised of silicon oxide-aluminum oxide-chromium oxide and a sintering aid.

Members for semiconductor manufacturing apparatus and method for producing the same

In order to advantageously solve problems such as lowering of the productivity, contamination of alloy coating due to the adoption of different metal, increase of the cost due to the adoption of different coating process, a coating of MCrAlX alloy containing an oxide such as CoO, NiO or the like is directly formed at a thickness of 10&tilde;500 &mgr;m through a low pressure plasma spraying process containing substantially no oxide and thereafter the same MCrAlX alloy xontaining no oxide is applied thereonto at a thickness of 100&tilde;800 &mgr;m through a low pressure plasma spraying process in a non-oxidizing atmosphere to form a composite sprayed coating.

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Hyogo, Japan

Takema Teratani