Mitsubishi Chemical Corporation

Shin-etsu Handotai Co., Ltd.

Takehito Ushiki

Masaaki Miyamoto

Hidemi Nakanishi

Yoshitaka Shiraishi

Tatsuaki Hirohata

Hitoshi Tsunoda

Tsutomu Suzuki

Sadao Kumai

There are disclosed a semiconductor wafer which has undulation components on wafer back surface and/or wafer front surface of 10 &mgr;m or less represented in terms of power spectrum density at least for the components at a wavelength of 10 mm; method for producing a semiconductor wafer by polishing front surface of the semiconductor wafer which is held at its back surface, which utilizes a semiconductor wafer to be polished having undulation components on wafer back surface of 10 &mgr;m or less represented in terms of power spectrum density at least for the components at a wavelength of 10 mm; and wafer chuck provided with a holding surface for holding a wafer by chucking, wherein the holding surface has undulation components of 10 &mgr;m or less represented in terms of power spectrum density at least for the components at a wavelength of 10 mm. According to the present invention, undulation components of semiconductor wafers can be quantitatively evaluated, and thereby there can be provided a semiconductor wafer free from surface undulation components, a method for producing such a semiconductor wafer, and a wafer chuck therefor. Such undulation components may cause problems upon lithography, device separation and the like in the device-processing steps.

Semiconductor wafer, method for producing the same, and wafer chuck

A precision product container of the present invention comprises a resin composition as a base material, which comprises a polycarbonate resin and an epoxy compound. Such precision product container can remarkably prevent products contained therein from being contaminated by chlorine and is suitable as a container for a precision product which is free from operational errors of the precision product contained therein when this product is subsequently assembled or processed.

Precision product container

Growing community of inventors

Fukushima-ken, Japan

Takehito Ushiki