Canon Kabushiki Kaisha

Takehito Nishida

Shoji Shiba

Osamu Kanome

Junichi Sakamoto

Kenichi Iwata

Hiroyuki Tokunaga

Hiroshi Taniuchi

Takeshi Okada

Katsuhiko Takano

Yoshikatsu Okada

Tatsuo Furuta

Satoshi Nozu

A liquid discharge head includes a plurality of liquid chambers for pressurizing a liquid, the plurality of liquid chambers communicating with discharge ports respectively; and a plurality of piezoelectric elements provided in correspondence with the plurality of liquid chambers, respectively, the plurality of piezoelectric elements each including a lower electrode, a piezoelectric body film, and an upper electrode which are sequentially laminated in the stated order from the plurality of liquid chambers side. The lower electrode is provided up to a region corresponding to a portion between the plurality of liquid chambers. The piezoelectric body film is reduced in thickness at the region corresponding to the portion between the plurality of liquid chambers relative to the thickness of a region corresponding to the plurality of liquid chambers and completely covers at least the lower electrode provided to the region corresponding to the portion between the plurality of liquid chambers.

Liquid discharge head and method of manufacturing the same

A method for producing an ink jet head including, on a substrate, a piezoelectric element for discharging an ink from a discharge port, and an ink flow path communicating with the discharge port so as to correspond to the piezoelectric element, the method comprising in this order a step of providing, on the substrate, a mold material corresponding to the ink flow path, a step of providing a wall material of the ink flow path so as to cover the mold material, a step of eliminating a portion of the substrate corresponding to the piezoelectric element thereby forming a space in the substrate, and a step of eliminating the mold material thereby forming the ink flow path.

Method for producing ink jet head

An optical element comprising at least a plurality of pixels formed on a substrate and partition walls arranged respectively between adjacent pixels is manufactured by a method comprising steps of forming partition walls of a resin composition on a substrate, performing a dry etching process by irradiating the substrate carrying the partition walls formed thereon with plasma in an atmosphere containing gas selected from oxygen, argon and helium, performing a plasma treatment process by irradiating the substrate subjected to the dry etching process with plasma in an atmosphere containing at least fluorine atoms, and forming pixels by applying ink to the areas surrounded partition walls by means of an ink-jet system.

Method of manufacturing optical element

A method of manufacturing a liquid discharge head provided with a liquid flow path communicating with a liquid discharge port on a substrate has a step of forming a first electrically conductive layer on the substrate, a step of forming a molding member into the pattern shape of the flow path on the substrate, a step of forming a second electrically conductive layer on the molding member so as not to contact with the first electrically conductive layer, a step of forming a metal film by a plating process around the molding member by the utilization of the first electrically conductive layer and the second electrically conductive layer, and a step of removing the molding member and forming the flow path.

Method of manufacturing liquid discharge head

An optical element comprising at least a plurality of pixels formed on a substrate and partition walls arranged respectively between adjacent pixels is manufactured by a method comprising steps of forming partition walls of a resin composition on a substrate, performing a dry etching process by irradiating the substrate carrying the partition walls formed thereon with plasma in an atmosphere containing gas selected from oxygen, argon and helium, performing a plasma treatment process by irradiating the substrate subjected to the dry etching process with plasma in an atmosphere containing at least fluorine atoms, and forming pixels by applying ink to the areas surrounded by the partition walls by means of an ink-jet system.

Growing community of inventors

Tokyo, Japan

Takehito Nishida