Horiba Stec, Co., Ltd.

Takehisa Hataita

Sotaro Kishida

Akira Kuwahara

Hidetaka Yada

Soutaro Kishida

Hideaki Miyamoto

Junya Nakai

The pressure sensor comprises the diaphragm, an electrode body, a housing, an inlet pipe, and a thermal buffer member. The diaphragm includes a pressure receiving surface configured to receive a pressure of a measured target fluid. The electrode body includes an electrode surface facing a rear surface of the pressure receiving surface with a gap interposed therebetween. The housing supports the diaphragm so as to form a measuring chamber by surrounding the pressure receiving surface. The inlet pipe is coupled to the housing and configured to guide the measured target fluid into the measuring chamber. The thermal buffer member is disposed on the inlet pipe and has a predetermined heat capacity. Accordingly, the diaphragm is unlikely to bend due to a rapid temperature change in a fluid guiding pipe disposed a fluid line.

Pressure sensor with reduced deviation of temperature distribution

In order to solve a problem occurring in a capacitance type pressure sensor adapted to measure absolute pressure, and thereby reduce error, a pressure type flowmeter includes a fluid resistance part in a flow path through which fluid flows and measures a flow rate by detecting the upstream and downstream pressures of the fluid resistance part. Respective pressure sensors for detecting the upstream and downstream pressures are configured to be gauge pressure sensors. Each of the gauge pressure sensors is a capacitance type pressure sensor adapted to measure gauge pressure by detecting a change in the capacitance between a diaphragm displaceable by pressure and a fixed electrode and has a main body part that supports the fixed electrode and the diaphragm and forms a space between them. Further, the internal space is adapted to communicatively connect to the outside through a communicative connection part.

Pressure type flowmeter

Provided is a capacitive pressure sensor that prevents the position of an electrode face in the direction parallel to a diaphragm from deviating from the position of the diaphragm, and accurately measures pressure. The capacitive pressure sensor includes: the diaphragm that deforms under pressure; an electrode member having the electrode face opposed to the diaphragm with a gap between the diaphragm and the electrode face; a body having one end to which the diaphragm is joined, and accommodating at least a portion of the electrode member; an insulating positioning member that is provided in the body and positions at least the portion of the electrode member in the body; and a pressing mechanism that holds and presses the insulating positioning member or the electrode member in the direction parallel to the diaphragm.

Capacitive pressure sensor with reduced sensitivity to temperature change

Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.

Capacitive pressure sensor

A structure comprising: a base; a diaphragm; a peripheral wall member of which one end surface is attached to a circumferential edge part of the diaphragm and the other end surface is attached on the top surface of the base to form an internal space together with the base and the diaphragm; a protruding part that protrudes from the top surface of the base; and a communicatively connecting path that extends from a bottom surface side of the base toward the diaphragm, and communicatively connects the internal space and the outside to each other to flow fluid, wherein on an outer lateral surface of the protruding part, an opening is formed in a part intersecting with an inner lateral surface of the communicatively connecting path, and a part of a fore end inner surface of the communicatively connecting path is formed in the protruding part.

Structure for use with fluid diaphragm

In order to provide a fluid resistance device that is easily manufactured, compact, accurate, and uniform in performance, the fluid resistance device comprises two members that have facing surfaces that face each other and a downstream end of the upstream side flow channel and an upstream end of the downstream side flow channel open at positions displaced from each other on the facing surfaces, and a ring body that is arranged to surround the downstream end opening and the upstream end opening and that forms the fluid resistance channel between the downstream end opening and the upstream end opening by being sandwiched by the facing surfaces, and is so configured that the ring body is made of a material harder than that of each member, and the ring body breaks into the facing surfaces by fastening two members so as to make the facing surfaces approach each other.

Fluid resistance device

The present invention is adapted to prevent a diaphragm from being deformed by a thermal stress caused by thermal expansion coefficients of a sensor main unit and a fixing member and includes a sensor main unit to which a fixed electrode is fixed, a diaphragm structure that forms a sealed space between the diaphragm structure and the sensor main unit and a fixing member that is jointed to the diaphragm structure in a manner of surrounding a pressure receiving part of the diaphragm structure so as to lead a fluid to the pressure receiving part, wherein the diaphragm structure includes a flat plane diaphragm main unit and first and second ring members each having a known thermal expansion coefficient that are respectively provided on both sides of a circumference of the diaphragm main unit.

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Kyoto, Japan

Takehisa Hataita