Hitachi-high-technologies Corporation

Takehiro Tatizaki

Masahiro Watanabe

Toshihiko Nakata

Takenori Hirose

Teruaki Tokutomi

Kaifeng Zhang

Tsuneo Nakagomi

Shinji Honma

To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit.

Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus

Growing community of inventors

Yokohama, Japan

Takehiro Tatizaki