Nihon Dempa Kogyo Co., Ltd.

Takehiro Takahashi

Shuichi Mizusawa

Takumi Ariji

Masakazu Harada

Kozo Ono

Kenji Shimao

Hiroaki Yamada

Yoshiaki Amano

Hiroyuki Sasaki

Motoo Takada

Manabu Ishikawa

Masahiro Yoshimatsu

Shinobu Yoshida

Kunio Morita

Hiromasa Nakatake

Takuji Yamamoto

Nobuo Hiruma

A piezoelectric device includes a piezoelectric vibrating piece, a lid portion, and a base portion. The piezoelectric vibrating piece includes: a vibrating portion; a framing portion surrounding the vibrating portion; an excitation electrode in the vibrating portion; and an extraction electrode electrically connected to the excitation electrode in the framing portion. The lid portion is bonded to a front surface of the piezoelectric vibrating piece via a bonding material. The base portion includes an external electrode bonded to a back surface of the piezoelectric vibrating piece via a bonding material and electrically connected to the extraction electrode. The excitation electrode and the extraction electrode each include: a foundation film formed of metal to be rendered passive; and a first metal film and a second metal film laminated to the foundation film. The foundation film has a film thickness of 1.0 nm to 8.0 nm.

Piezoelectric device

A piezoelectric vibrating device and a piezoelectric vibrating piece including an excitation unit, a framing portion and a connecting portion are provided. The excitation unit includes a first side extending in a first direction and a second side extending in a second direction. The connecting portion has a thickness of a first thickness in a third direction perpendicular to the first direction and the second direction. The excitation unit includes a first region, a second region and a third region. The pair of excitation electrodes are disposed on the first region. The second region with the first thickness is directly connected to the connecting portion. The third region is disposed between the first region and the second region. The third region has a thickness in the third direction of a second thickness. The second region has a thickness in the third direction that is thicker than the second thickness.

Piezoelectric vibrating piece and piezoelectric device

A crystal device is provided, in which a peeling of a bonding material is prevented by using the bonding material having a thermal expansion coefficient which is between the coefficients in a first direction and a second direction of a bonding surface of a crystal element. A crystal device includes a rectangular crystal element formed with a crystal material that includes an excitation part and a frame surrounding the excitation part. The device further includes a rectangular base bonded to a principal surface of the frame, and a lid bonded to another principal surface of the frame; and the frame, the base and the lid have edges respectively along a first direction and a second direction intersecting with the first direction. The bonding material is applied having a thermal expansion coefficient that is between the coefficients in the first direction and second direction of the crystal element.

Crystal device

A piezoelectric vibrating piece includes an excitation unit in a rectangular shape, a framing portion, a connecting portion, and a protrusion. The excitation unit includes a pair of excitation electrodes on the pair of principal surfaces, a first side that extends in a first direction, and a second side that extends in a second direction. The second side is longer than the first side. The second direction is perpendicular to the first direction. The connecting portion connects the first side of the excitation unit to the framing portion. The connecting portion is thinner than the framing portion. The protrusion protrudes in the thickness direction in at least one of the connecting portion and a region between the connecting portion and the excitation electrode. The length of the protrusion in the first direction is equal to or longer than a length of the connecting portion in the first direction.

A piezoelectric vibrating piece includes a first extraction electrode and a second extraction electrode. The first extraction electrode is extracted from an excitation electrode formed on one principal surface to a framing portion via one principal surface of a connecting portion. The second extraction electrode is extracted from the extraction electrode formed on another principal surface to the framing portion via another principal surface of the connecting portion, a side surface of the connecting portion, and the one principal surface of the connecting portion. A distance between a first side and a second side at the framing portion is larger than a distance between the first side and the second side at the connecting portion. The first side is a side of the first extraction electrode at the second extraction electrode side. The second side is a side of the second extraction electrode at the first extraction electrode side.

A piezoelectric device includes a piezoelectric vibrating piece with a pair of excitation electrodes, a base plate, and a non-conductive bonding material. The base includes a pair of castellations that are hollowed into a side face from the mounting surface to the bonding surface. The pair of castellations include a first surface and a second surface. The first surface extends outward from the mounting surface toward the bonding surface side. The second surface extends outward from the bonding surface toward the mounting surface side. The second surface has a smaller area than an area of the first surface. A wiring electrode is disposed on the first surface, the second surface, and a side face of the bonding material. The wiring electrode is of a same electrode layer as the external electrode. The wiring electrode extends from the external electrode to the extraction electrodes.

Piezoelectric device and method for manufacturing the same

A piezoelectric vibrating piece is to be bonded to and sandwiched between a lid plate and a base plate with an external electrode. The piezoelectric vibrating piece has a first main surface at the lid plate side and a second main surface at the base plate side. The piezoelectric vibrating piece includes an excitation unit, a first excitation electrode, a second excitation electrode, a framing portion, one connecting portion, a first extraction electrode, and a second extraction electrode. The connecting portion includes a planar surface parallel to both the main surfaces and a side face intersecting with the planar surface. The first extraction electrode is extracted via the connecting portion. The second extraction electrode is extracted via the connecting portion. The first extraction electrode is disposed on at least a part of the side face of the connecting portion to be extracted to the framing portion.

Piezoelectric vibrating piece, piezoelectric device, and method for manufacturing piezoelectric device

A piezoelectric vibrating piece includes an excitation unit in a rectangular shape, a framing portion, and a connecting portion. The excitation unit includes two principal surfaces, a pair of excitation electrodes on the principal surfaces, a first side extending in a first direction, and a second side extending in a second direction. The second side is longer than the first side, and is perpendicular to the first direction. The framing portion surrounds the excitation unit. The connecting portion connects the excitation unit to the framing portion. The connecting portion has a third side which is connected to the first side and extends in the first direction and a fourth side which is connected to the framing portion and extends in the first direction. A thickness of the connecting portion is thinner than that of the framing portion. The third side has a different length from that of the fourth side.

A mesa-structure crystal element includes a circumferential portion having a thin thickness, a first convex portion formed on a plane in a center side from the circumferential portion and having a first height from the circumferential portion in a first principal face and a first planar shape, and a second convex portion formed in a center side from the circumferential portion and having a second height from the circumferential portion in a second principal face opposite to the first principal face and a second planar shape, wherein at least one of an area and a planar shape is different between the first planar shape of the first convex portion and the second planar shape of the second convex portion, or the first height of the first convex portion is different from the second height of the second convex portion.

Crystal element and crystal device

A piezoelectric device () comprises: a piezoelectric vibrating piece (); a frame body () separated from piezoelectric vibrating piece by through-hole (); a piezoelectric frame () having a supporting portion (), a first surface (Me) and a second surface (Mi); a package lid () having a first connecting surface (M) a package base (), including a mounting surface (M) for forming a pair of external electrodes () and a top surface having a second connecting surface (M); a first sealing material (LG) formed between the first connecting surface and the first surface; and a second sealing material (LG) formed between the second connecting surface and the second surface. The first sealing material or the second sealing material extends to a side surface (M) of the through-hole.

In a piezoelectric device, a piezoelectric substrate includes a vibrating piece with respective excitation electrodes on each principal surface thereof. The piezoelectric substrate is surrounded by an outer frame separated therefrom by a through-void except for a supporting portion connecting the vibrating piece to the frame. Extraction electrodes extend from the excitation electrodes across the supporting portion to the frame, and on edge surfaces of the supporting portion. The piezoelectric substrate is sandwiched between a lid and a package base to form a piezoelectric device. The outer surface of the package base is a mounting surface to which the extraction electrodes extend via an edge surface of the through-void in a region that does not overlap the excitation electrode.

Piezoelectric devices and methods for manufacturing piezoelectric substrates used in such devices

AT-cut quartz-crystal vibrating pieces and corresponding quartz-crystal devices are disclosed each having a vibrating portion surrounded by a frame portion across a through-slot configured to provide a wide vibrating portion. An exemplary vibrating piece has a quartz-crystal vibrating portion that vibrates when electrically energized, a frame portion surrounding the vibrating portion, and a through-slot defined between the vibrating portion and the frame portion. The through-slot includes a first through-slot extending in the X-axis direction along +Z'-edge of the vibrating portion, and a second through-slot extending in the X-axis direction along the &#x2212;Z&#x2032;-edge of the vibrating portion. The first through-slot has a different width than the second through-slot.

At-cut quartz-crystal vibrating pieces and devices, and methods for manufacturing same

A first metal film is formed on a piezoelectric substrate surface. A pattern of openings forming a first resist mask is formed in the first metal film. Portions of the metal film are removed by etching. The substrate is brought into contact with a first etching solution to remove substrate material to shape an outer surface. After, openings in the first metal film are filled in with a second metal film. The substrate is shaped into a first plurality of piezoelectric resonators using a second etching solution. Rough frequency adjustment is conducted by etching side surfaces of the substrate in increments and cutting a piezoelectric resonator from the substrate. The rough frequency adjustment continues until a measured oscillation frequency is within a predetermined frequency range. Electrode patterns then are formed for each one of the second plurality of piezoelectric resonators.

Method for manufacturing piezoeletric resonator

Quartz-crystal vibrating devices are disclosed, including vibrating and frame portions separated by a through-slot. An edge surface of the slot has a protrusion preventing unwanted formation of artifact 'electrodes.' The vibrating portion and frame are made of AT-cut quartz as a unit. A joining portion couples the frame and vibrating portion together across the through-slot. A package base has two external electrodes. A third frame region has first and second plane surfaces. The protrusion projects toward the vibrating portion and has first and/or second sloped surfaces. First and second extraction electrodes extend from respective excitation electrodes via respective joining portions to respective external electrodes. The extraction electrodes pass across the first plane surface and first sloped surface or across the second plane surface and second slanted surface.

Quartz-crystal devices exhibiting reduced electrical impedance

A crystal device includes; a base, a framed crystal vibrating blank in which a mesa section is formed on an upper face end bonded to a seal path on an upper surface of the base via a low melting point glass layer or a resin adhesive layer, and a lid bonded to a seal path on an upper surface of the framed crystal vibrating blank via a low melting point glass layer or a resin adhesive layer. A pillow made of low melting point glass or a resin adhesive that suppresses vibration amplitude at the time of a drop impact of the framed crystal vibrating blank is formed on a rear surface of the lid simultaneously with the low melting point glass layer or the resin adhesive layer.

Growing community of inventors

Saitama, Japan

Takehiro Takahashi