Kabushiki Kaisha Toshiba

Takehiro Hato

Hiroshi Ohno

Takahiro Kamikawa

Hiroya Kano

In a state estimation method of an embodiment, from time series data representing a time change of a main physical quantity concerning an estimation target, a local maximum and minimum values of the main physical quantity, and an inter-extreme-value time from an extreme value to the next extreme value are extracted. In the state estimation method, a state change speed of the estimation target is calculated based on relationship data representing the relationship of the state change speed with the local maximum and minimum values and the extracted local maximum and minimum values. In the state estimation method, a state change amount of the estimation target is calculated for each inter-extreme-value time based on the extracted inter-extreme-value time and the calculated state change speed.

State estimation method, state estimation apparatus, state estimation system, and non-transitory storage medium

An apparatus for inspecting object surface according to an embodiment includes: an imaging device including an imaging area; an optical source; and a group of optical devices including a mirror and a lens, and causing a reflected light other than a regular reflection light from an object to be reflected by a mirror surface of the mirror, and to form an image in the imaging area of the imaging device through the lens, the regular reflection light being caused by a light incident to a surface of the object from the optical source, wherein the optical source, the mirror, the lens, and the imaging device are arranged in such a manner that the regular reflection light is not incident to the imaging area of the imaging device through the mirror and the lens.

Apparatus for inspecting object surface

According to one embodiment, an optical inspection apparatus including: an imaging optical system; one or more light sources; a light guide which extends cylindrically along an optical axis of the imaging optical system and whose end face is opposed to the one or more light sources; a total reflecting surface formed on an inner surface of the light guide to totally internally reflect light struck into the light guide from the end face; a mirror surface formed on an outer surface of the light guide to reflect light struck into the light guide from the one or more light sources, toward the inspection target; and a transmission surface formed on the inner surface of the light guide to transmit the light reflected by the mirror surface, toward the inspection target.

Optical inspection apparatus

An optical inspection apparatus includes an imaging optical system facing an inspection target, a light guide, a plurality of light sources, and a plurality of mirror surfaces. The light guide has a plurality of corner portions and extending along an optical axis of the imaging optical system. The plurality of light sources face a first end face of the light guide at positions corresponding to the plurality of corner portions. The plurality of mirror surfaces are respectively provided on second end faces of the light guide. Each of the mirror surfaces is oblique relative to the optical axis. The mirror surfaces are configured to reflect light entered into the light guide from the light sources toward the inspection target.

Growing community of inventors

Tokyo, Japan

Takehiro Hato