Canon Kabushiki Kaisha

Sony Corporation

Onoda Cement Co., Ltd.

Takehiko Ueno

Toshiki Ito

Takashi Yoshida

Hitoshi Sato

Tsutomu Itoh

Takamichi Mitsuhashi

Keiji Yamashita

Youji Kawasaki

Akiko Iimura

Sentaro Aihara

Nobuo Furuya

Yasunari Okamoto

Shinya Fukushima

Mitsuyoshi Kumada

Tatsuo Sugimoto

Kenjiro Shimizu

Tsunenobu Ujihara

Katsutoshi Kozoe

Shinichi Kimura

An imprint apparatus that transfers a pattern of a mold to an imprint material on a substrate, includes: a mold having a pattern region in which the pattern is formed; a substrate holding unit having a substrate mounting surface on which the substrate is mounted; a driving unit configured to drive the mold and press the mold against the substrate coated with an imprint material at three or more positions; and a control unit configured to control a pressing force of the driving unit based on a distance in an XY plane parallel to the substrate mounting surface between the driving unit and a top portion of a convex shape of at least one of the mold and the substrate deformed by the deformation mechanism.

Imprint apparatus, imprint method, and article manufacturing method

The present invention provides an imprint apparatus that performs imprint processing of forming a pattern of an imprint material on a substrate using a mold, the apparatus including an image sensing unit configured to sense at least one of the mold and the substrate and obtain an image, and a determination unit configured to determine normality/abnormality of the imprint processing, wherein the imprint processing includes a first step of supplying the imprint material onto the substrate, and a second step of bringing the mold and the imprint material on the substrate into contact with each other, and the determination unit changes a reference of determination of the normality/abnormality of the imprint processing for each step of the imprint processing and determines the normality/abnormality of the imprint processing based on the image sensed by the image sensing unit.

Imprint apparatus

An imprint method includes: placing a light-curable composition on a workpiece substrate (placement); bringing the light-curable composition and a mold into contact with each other an atmosphere of a condensable gas (contact); aligning the mold and the workpiece substrate (alignment); irradiating the light-curable composition with light to obtain a light-cured composition (irradiation); and separating the light-cured composition and the mold from each other after the irradiation (release). The film thickness of the light-curable composition during the alignment is 20% or more greater than that of the light-cured composition after the release.

Imprint method and apparatus

An image-pickup display apparatus including a camera unit with: an image-pickup optical system; an image-pickup device having a light intercepting surface at a position of image formation by the image-pickup optical system, a signal processing circuit for generating a picture signal based on an image-pickup signal output by the image-pickup device, and a controller for correcting exposure by controlling the image-pickup device and the signal processing circuit. The display unit also includes: a liquid-crystal display unit having a liquid-crystal display panel and a back-light, a driver for driving and controlling the liquid-crystal display panel, a back-light controller for driving and controlling the back-light, and a picture processor for outputting a driving signal to the driver on the basis of the picture signal generated by the signal processing circuit employed in the camera unit, where receiving a drive/control signal output by the driver employed in the display unit as a feedback signal, the controller employed in the camera unit controls the image-pickup device and the signal processing circuit employed in the camera unit as well as the picture processor and the back-light controller employed in the display unit to put the drive/control signal in an optimum range.

Image-pickup display apparatus

A powder coating booth a function of supplying air though its ceiling. Sidewalls of the booth is formed from an insulating material or a semiconductor. A belt conveyor is disposed at the bottom of the booth. An electric field is formed so that it extends from a paint gun to the conveyor belt. The majority of oversprayed powder paint produced during painting becomes attached to the upper surface of a portion of the conveyor belt, is carried, together with this belt portion, to the outside of the booth, and is recovered from the conveyor by a blowing-type of static eliminator, thereby minimizing the mount of oversprayed powder paint mixed in an exhaust of the booth drawn through the sidewall.

Powder coating booth

Method for adjusting an electronic circuit

Growing community of inventors

Tokyo, Japan

Takehiko Ueno