Canon Kabushiki Kaisha

Takehiko Mayama

Shinji Wakui

Hiroaki Kato

Yukio Takabayashi

Takao Ukaji

Isao Iwai

Takashi Shibayama

Michio Yanagisawa

Shuichi Adachi

A vibration isolation device which dampens vibration of an object. The device includes a vibration isolation unit that can be activated in a plurality of vibration isolation modes, an acquisition unit that acquires estimate information associated with vibration of a floor, in which the acquisition unit receives data associated with an influence degree of seismic vibration and an influence time zone of the seismic vibration from an external device, and a control unit that selects a vibration isolation mode from the plurality of vibration isolation modes, in accordance with the estimate information acquired by the acquisition unit, and activates the vibration isolation unit in the selected vibration isolation mode. The control unit switches between the vibration isolation modes of the vibration isolation unit in accordance with the influence degree and the influence time zone.

Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method

An active vibration suppression apparatus includes a rotating actuator which is fixed to a vibration suppression target and generates a torque in a rotational direction, an inertial load which is connected to the actuator and moves in the rotational direction relative to the vibration suppression target in accordance with a torque of the actuator, and a driving circuit for generating a driving command signal for controlling the inertial load and driving the rotating actuator in accordance with the driving command signal. The rotating actuator rotates/drives the inertial load with a generated torque, and reduces vibrations produced in the vibration suppression target by applying a drive reaction force generated upon rotating/driving the inertial load as a control torque to the vibration suppression target.

Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus

An exposure apparatus includes a motion control system, the motion control system including a structure, a plurality of actuators to apply forces to the structure, respectively, and a plurality of sensors to sense motion states of the structure, respectively. The apparatus includes a pseudo-random signal generator to generate a plurality of pseudo-random signals and to apply the plurality of pseudo-random signals to the plurality of actuators, the plurality of pseudo-random signals being equal in number to a number of degrees of freedom of the motion control system, a storage unit to store a first plurality of time-series data obtained by the plurality of sensors with a second plurality of time-series data corresponding to the plurality of pseudo-random signals, and a characteristic deriving unit to derive a characteristic of the motion control system based on the first and second plurality of time-series data.

Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method

An active vibration suppression apparatus includes an actuator fixed to a vibration suppression target, an inertial load driven relative to the target by the actuator, and a driving system which drives the actuator based on a first signal corresponding to the vibration, generated or to be generated, of the target. The driving system includes a compensation unit which performs a compensation for the first signal. The compensation, separately or as a composite compensation includes (i) a linear compensation for the first signal to obtain a first compensated signal, and (ii) a nonlinear compensation for the first compensated signal to obtain a second compensated signal. A rate of a change in the second compensated signal to a change in an absolute value of the first compensated signal becoming less with an increase of the absolute value.

An oscillation isolator for supporting an oscillation isolation platform on a pedestal includes an active oscillation isolator having a displacement generating type actuator to reduce oscillation of the platform and a displacement adjuster provided between the active oscillation isolator and the platform or the pedestal for adjusting relative displacement between the active oscillation isolator and the platform or the pedestal. The displacement adjuster has a rigidity higher than that of the active oscillation isolator and is dynamically located in series between the active oscillation isolator and the platform or the pedestal.

Oscillation isolator

A vibration suppressing system includes a structural member with respect to which vibration suppression is to be executed, an actuator, having a pair of a fixed member and a movable member, for moving the movable member relative to the fixed member, and a first vibration sensor for measuring vibration of the structural member. A displacement sensor measures a movement distance of the movable member, a second vibration sensor measures vibration of the movable member, and a controller controls the actuator on the basis of outputs from the first vibration sensor, the displacement sensor and the second vibration sensor.

Anti-vibration system in exposure apparatus

An anti-vibration apparatus for actively damping vibrations of an object by generating control forces for reducing the vibrations includes a first actuator for generating a first control force, and a second actuator which generates a second control force and is driven on a driving principle different from that for the first actuator. The first actuator generates forces in the vertical and horizontal directions. The second actuator generates a force in at least one of the vertical and horizontal directions.

Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method

An anti-vibration apparatus is equipped with a plurality of active support legs which support an anti-vibration table and which are able to actively operate to control the motion of the anti-vibration table in a horizontal plane. The apparatus is further equipped with a pressure feedback loop for detecting the internal pressure of an air spring provided in each of the plurality of active support legs and for feeding a signal, which is based on the detected internal pressure of the air spring, back to the control system of the anti-vibration apparatus.

Anti-vibration apparatus and anti-vibration method thereof

A vibration damping apparatus includes a plurality of actuators for removing vibration of a table as an object of vibration damping, a detection device for detecting a vibration status of the table, an acquisition device for acquiring compensation amounts for a plurality of directional elements, from the vibration status detected by the detection device, and an allocation device for allocating an actuator-driving force corresponding to a compensation amount for a predetermined directional element, among the compensation amounts acquired by the acquisition device, to an actuator having a small amount of driving force, allocated based on a compensation amount for another directional element.

Vibration damping apparatus and method

An anti-vibration apparatus has a feedback loop based on vibration information from an anti-vibration table, and a feedforward loop based on vibration information from a setting foundation. A compensation mechanism in the feedforward loop uses an adaptive filter. The adaptive filter sequentially sets parameters in the compensation mechanism on the basis of the vibration information form the anti-vibration table and setting foundation. The vibration information consists of vibration component information indicating vibrations in units of motion directions, and a determination mechanism and an operation switching mechanism arranged at the input side of the adaptive filter select the vibration component information and supply the selected information to the adaptive filter.

Anti-vibration apparatus and method

An active anti-vibration apparatus includes an anti-vibration mount, which has an actuator and a vibration sensor, for supporting an anti-vibration table, and a control unit for driving the actuator on the basis of output from the vibration sensor. The control unit separates the output from the vibration sensor into high frequency components and low frequency components, applies proper compensation calculation for the respective separated frequency components, and drives the actuator.

Active anti-vibration apparatus

An anti-vibration system includes an anti-vibration table on which a precise machine, having a driving device and having directions of freedom, is mounted, a plurality of supporting mechanisms for supporting the anti-vibration table and for suppressing vibration of the table, a plurality of actuators for applying a control force to the anti-vibration table, a vibration sensor for detecting vibration of the anti-vibration table, and a control device for actuating the actuators on the basis of an output of the vibration sensor to actively control vibration of the anti-vibration table. The actuators are disposed each in a direction forming a certain angle with respect to the directions of freedom of the precise machine. The angle is determined on the basis of a control force required to be applied by the actuators to the table to control the vibration of the table with respect to each direction of freedom of the precise machine. A drive reactive force to be applied to the anti-vibration table from the precise machine in response to the operation of the driving device, is distributed to the supporting mechanisms and the actuators.

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Utsunomiya, Japan

Takehiko Mayama