Fujitsu Corporation

Fujitsu Media Devices Limited

Takeaki Shimanouchi

Satoshi Ueda

Masahiko Imai

Osamu Toyoda

Tadashi Nakatani

Xiaoyu Mi

Takashi Katsuki

Anh Tuan Nguyen

Yu Yonezawa

Takahiro Imamura

Naoyuki Mishima

Norinao Kouma

Tsutomu Miyashita

Hitoshi Kanai

Nobuhisa Aoki

Shinji Koganezawa

Yuuta Nakaya

Ryosuke Koishi

Takeshi Takano

Yukihiro Uematsu

Yoshio Sato

Ryousuke Koishi

A disclosed power generating device includes: a first magnetostrictive bar; a second magnetostrictive bar extending alongside the first magnetostrictive bar; a joint member coupling the first magnetostrictive bar and the second magnetostrictive bars; and a coil group including a first coil wound around the first magnetostrictive bar and a second coil wound around the second magnetostrictive bar, wherein the first coil and the second coil are connected in series.

Power generating device and sensor system

A MEMS switch has fixed support, a plate-shaped flexible beam having at least one end immovably supported by the fixed support and having an extending movable surface, a movable electric contact disposed on the movable surface of the flexible beam, a fixed electric contact facing the movable electric contact and disposed at a fixed position relative to the fixed support, first piezoelectric driver disposed above the movable surface of the flexible beam, extending from a portion above the fixed support towards the movable electric contact, and capable of displacing the movable electric contact towards the fixed electric contact by voltage driving, and second piezoelectric driver disposed at least on the movable surface of the flexible beam and capable of so driving a movable part of the flexible beam by voltage driving that the movable electric contact is separated from the fixed electric contact.

MEMS switch

A first variable capacitance section included in a variable capacitance circuit includes a plurality of first variable capacitance elements connected to a signal line and each having a first capacitance value or a second capacitance value greater than the first capacitance value according to driving voltage, and includes a first fixed capacitance element connected in series with the plurality of first variable capacitance elements. A second variable capacitance section included in the variable capacitance circuit includes a second variable capacitance element connected to the signal line and having the first capacitance value or the second capacitance value according to the driving voltage, and includes a second fixed capacitance element connected in series with the second variable capacitance element.

Variable capacitance circuit and impedance matching circuit

A power generation device includes: first and second beams which are arranged to face each other and are bent by vibration; and a coil wound around the first and second beams. Each of the first and second beams includes: a beam body; and a stress relaxation layer made of a material different from a material of the beam body and partially covering the surface of the beam body.

Power generation device

An electronic device includes a substrate; an element configured to be formed on the substrate; a sidewall member configured to enclose the element on the substrate; a cover member configured to be disposed on the sidewall member, and to partition a space around the element along with the sidewall member on the substrate; and a seal member configured to be disposed outside of the sidewall member, to bond the sidewall member and the cover member to a surface of the substrate, and to seal the space.

Electronic device and manufacturing method thereof

An electronic device having a variable capacitance element, includes a support substrate providing physical support, a pair of anchors formed on the support substrate, and having support portions in a direction perpendicular to a surface of the substrate, a movable electrode supported by the support portions of the pair of anchors, having opposing first and second side surfaces constituting electrode surfaces, and at least partially capable of elastic deformation, a first fixed electrode supported above the support substrate, and having a first electrode surface opposing to the first side surface of the movable electrode, and a second fixed electrode supported above the support substrate, and having a second electrode surface opposing to the second side surface of the movable electrode.

Electronic device having variable capacitance element and manufacture method thereof

An electronic device includes: a base member; a conductive film including a first end portion and a second end portion fixed to the base member, the conductive film being movable in a lateral direction of the base member between the first end portion and the second end portion; a first driving electrode, which is provided in the base member at a position opposed to a first main surface of the conductive film, and to which a first driving voltage is applied; a second driving electrode, which is provided in the base member at a position opposed to a second main surface of the conductive film, and to which a second driving voltage is applied; and a terminal provided in the base member at a position where the terminal enables to come into contact with the second main surface of the conductive film.

Electronic device, method of manufacturing the electronic device, and method of driving the electronic device

A movable electric device includes: a first and second fixed electrodes formed on a support substrate, and having opposing electrode surfaces which are substantially perpendicular to the surface of the support substrate, and define a cavity therebetween; a movable member having a movable electrode having a first end disposed near the first fixed electrode and a second end disposed near the second fixed electrode, and bent spring member continuing from at least one of the first and second ends of the movable electrode, and including part which is bent in thickness direction of the movable electrode; and first and second anchors disposed on the support substrate and supporting the movable member at its opposite ends.

Electrical device having movable electrode

There is provided a method for fabricating a device, preferably for a micro electro electro mechanical system. The method includes forming a first electrode on a substrate, where the first electrode has a first sloped end at least at one end thereof; forming a sacrificial layer on the first electrode, where the sacrificial layer has a first sloped edge, the first sloped edge and the first sloped end are overlapped each other so that a thickness of the first sloped edge decreases as a thickness of the first sloped end increases; forming a first spacer on the first electrode, where the first spacer has contact with the first sloped edge; forming a beam electrode on the sacrificial layer and the first spacer; and removing the sacrificial layer after the forming the beam electrode.

Method for fabricating MEMS device and MEMS device

There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.

Variable capacitor, matching circuit element, and mobile terminal apparatus

A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.

Electrostatic actuator and driving method thereof

A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.

Variable capacitive element, variable capacitive device, and method for driving the variable capacitive element

A variable capacitance element provided with a substrate, a signal line provided on the substrate, a fixed electrode provided on the substrate, and a movable electrode. The movable electrode includes a movable portion that spans the signal line and extends to above the fixed electrode, and is movable with respect to the fixed electrode, and a fixed portion that is fixed to the fixed electrode across a dielectric layer.

Variable capacitance element

A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.

Movable micro-device

A variable capacitor is provided which is appropriate for suppressing fluctuation in driving voltage characteristic and for achieving a larger variation ratio of static capacitance. The variable capacitor includes a fixed electrode and a movable electrode. The fixed electrode includes a first opposing face, while the movable electrode includes a second opposing face that faces the first opposing face. The movable electrode further includes a curved portion that protrudes toward the fixed electrode. The variable capacitor also includes a dielectric pattern provided on the first opposing face.

Growing community of inventors

Kawasaki, Japan

Takeaki Shimanouchi