Dainippon Screen Mfg. Co., Ltd.

Dainippon Screen Mfg., Ltd.

Takayuki Umaba

Hideki Adachi

Syunsuke Takagi

Jiro Ono

Mokuhei Hashimoto

Hirofumi Shimizu

Tetsu Takahashi

Makoto Sawada

Takamasa Sakai

Motohiro Kono

Yoshihiro Koyama

Koichi Mukaegaki

Yoshiyuki Nakagawa

Tsuruo Matsumoto

A substrate coating apparatus includes a stage, a coating liquid tank, and a moving mechanism. The stage holds the substrate to be vertical or inclined. The tank has a hollow body extending along the widthwise direction of the substrate, with opposing ends closed. The tank has a protruding front end surface which can be positioned facing the substrate surface to be coated. The tank has an outlet path having an opening over the width of the area to be coated, and an inlet opened in the tank below the outlet. The moving mechanism holds the tank such that the front end surface thereof faces the surface of the substrate, with a prescribed space, for example, 0.1 to 0.3 mm, therebetween. The moving mechanism moves the tank vertically relative to the substrate, from a start position to an end position, while the predetermined space between the tank and the surface is maintained. The front end surface of the tank has a lower edge positioned between the outlet and the inlet of the coating liquid outlet path. The upper edge of the front edge surface being between the outlet and a maximum height position reached by coating liquid in the gap by capillary action or, it may be formed above the maximum height, assuming that the front end surface of the coating liquid tank and the substrate surface to be coated extend infinitely upward to define the gap of said prescribed size therebetween.

Apparatus for coating substrate

A screen printing plate includes a plate body having a front surface and a rear surface. The plate body has a plurality of openings penetrating from the front surface to the rear surface and formed according to a preselected pattern. A recess is formed on the rear surface of the plate body so as to surround the opening. A separation wall defining the boundary of the opening and the recess is formed between this one opening and the recess. The spreading of the solder paste onto a surface to be printed around the opening and onto the rear surface of the printing plate is restricted by the recess when the paste is transferred onto the surface to be printed from the opening. The paste does not go beyond the boundary defined by the edge on the side of the recess.

Metal mask plate for screen printing

A printing apparatus including: a screen having a printing plate portion and reinforcing strips formed on both sides of the printing plate portion; a stretching device for stretching the screen by applying a predetermined tension thereto in a longitudinal direction of the strips; a squeegee for sliding on the screen in the same direction as the longitudinal direction of the strips, thereby transferring ink onto a surface subjected to printing; and a support table for supporting a material subjected to printing. The squeegee has a width larger than the minimum spacing of the strips on both sides of the printing plate portion. When the squeegee slides on the screen, it presses the printing plate portion and the strips on both sides simultaneously. In printing, the portion of the screen in contact with the surface subjected to printing is maintained flat in the transverse direction. A stretching amount of the screen in the moving direction of the squeegee is equal to a stretching amount of each strip. The screen is not damaged by deformation.

Screen process printing apparatus using a screen reinforced by strips

A screen process printing plate includes a screen holding plate provided with an opening and having flexibility and restoring capability. A screen is fixed to the screen holding plate and covers at least a part of the opening. A fixed member is provided for fixedly holding one end of the screen holding plate and a movable member is provided for holding an opposite end of the screen holding plate. The movable member is movable in a direction parallel to a plane defined by the screen. A biasing device is provided for biasing the movable member in a predetermined first direction away from the fixed member and in the direction of movement of the movable member. When a squeegee presses the screen holding plate and the screen, the screen holding plate and the screen are flexibly curved easily into contact with an object to be printed. Since the tension is supported by the screen holding plate, excessive tension does not occur in the screen. The screen is snapped-off by the restoring force of the screen holding plate.

Screen process printing plate for printing with high precision

A probing apparatus is used to measure electrical characteristics of a semiconductor device formed on a wafer. The apparatus includes means for holding the wafer in a vertical or slightly leaned position on a frame, a contact needle, three-directional drive means for holding the needle on the frame movably both vertically and horizontally along the device-bearing surface of the wafer and for bringing the needle into releasable contact with a desired portion of the device-bearing surface of the wafer, and a microscope provided in such a way that the tip of the needle is seen substantially at the center of the field of view, said microscope being movable together with the needle along the device-bearing surface of the wafer.

Probing apparatus for measuring electrical characteristics of

Growing community of inventors

Kyoto, Japan

Takayuki Umaba