Olympus Corporation

National Institute of Advanced Industrial Science and Technology

Takayuki Takano

Tsuyoshi Ikehara

Takashi Mihara

Mitsuo Konno

There is provided a technique that can increase sensitivity of a resonator. A ratio Rb/Ra between an inner diameter Rb and an outer diameter Ra of the resonatoris appropriately selected, and thus there may be a fixed point where an r component (U(Ra) or U(Rb)) of displacement in a radial direction and an r component (V(Ra) or V(Rb)) of displacement in a tangential direction are 0 on an outer diameter portion or an inner diameter portion of the resonator. In this case, the resonatoris supported by a holding memberconstituted by a single-span beam set so that a boundary condition on a side of the resonatoris pinned and a boundary condition on a side of an anchor that supports the resonatoris clamped at the fixed point, and this prevents vibration energy of the resonatorfrom being lost through the holding member, avoids a state to disturb a vibration mode, and achieves a sensor having high sensitivity.

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Tsukuba, Japan

Takayuki Takano