Jasco Corporation

Takayuki Sera

Hiroshi Sugiyama

Jun Koshoubu

Noriaki Soga

An object of the present invention is to provide a total reflection measuring apparatus which, while visually observing a specific minute area of a measurement object, is capable of efficiently obtaining optical data on the basis of the total reflection measurement. A microscopic total reflection measuring apparatus of the present invention comprises a Cassegrain mirrorhaving a Cassegrain primary mirrorand a Cassegrain secondary mirror, which condenses an incident light beamon a measurement objectby making an incident light beam successively reflected by the secondary mirrorand the primary mirror, and which obtains a reflected light beamfrom the measurement objectby making the reflected light beamsuccessively reflected by the primary mirrorand the secondary mirror. And, a total reflection prismis arranged below the Cassegrain secondary mirror. And the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and present invention comprises a visible light filter which separates at least one of the incident light beam to the total reflection prism and the reflected light beam from the total reflection prisminto a total reflection area B and a normal reflection area A, and which removes, from the one of the incident light beam and the reflected light beam, the visible light beam in the total reflection area B.

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Hachioji, Japan

Takayuki Sera