Tokyo Institute of Technology

Honda Motor Co., Ltd.

Adv Antest Corporation

Takayuki Ohba

Koji Sakui

Shinji Sugatani

Provided is a stacked device comprising: a plurality of circuit layers each having a circuit portion; an insulating layer configured to cover a plurality of circuit portions included in a part of circuit layers of the plurality of circuit layers, and a plurality of conductive vias provided in the insulating layer and electrically connected to the plurality of circuit portions, wherein the conductive via electrically connected to a partial circuit portion of the plurality of circuit portions is electrically insulated on an end surface on an opposite side to the plurality of circuit portions and the partial circuit portion is broken at least partially along a stacking direction.

Fabrication method of stacked device and stacked device

A first substrate having a first face and a second face is prepared. The first face has a plurality of product regions defined thereon. An electrode pad forming side of each of a semiconductor chip stack and a semiconductor chip is attached to each corresponding product region of the plurality of product regions. The second face of the first substrate is thinned. A first inorganic insulating layer is formed on the second face. A first vertical interconnection penetrates the first inorganic insulating layer and the first substrate and is electrically connected to an electrode pad of the semiconductor chip stack. A second vertical interconnection penetrates the first inorganic insulating layer and the first substrate and is electrically connected to an electrode pad of the semiconductor chip. A first horizontal interconnection electrically connects a part of the first vertical interconnection to a part of the second vertical interconnection.

Semiconductor device and method for manufacturing same

A method for manufacturing a semiconductor device is provided. In the method, first substrate is prepared. Each of the first substrates has first product regions. The first substrates are stacked, thereby electrically connecting different layers of the first substrates via a through-electrode. A second substrates having second product regions is prepared. Second semiconductor chips are attached to the second product regions. The second semiconductor chips are attached to the second substrate on a top layer of the first substrates. The second substrate is removed from the second semiconductor chips. First electrode pads of the top layer are electrically connected to second electrode pads of the second semiconductor chips via through-electrodes. The second semiconductor chips are connected to each other in parallel. The first and second product regions are separated, thereby manufacturing semiconductor chip stacks including more semiconductor chips in the top layer than the other layers.

A semiconductor device according to the present invention is formed by a plurality of semiconductor chips laminated on a substrate which are connected via a through electrode penetrating in a lamination direction, in which the plurality of semiconductor chips include first semiconductor chipseach having memory blocks and a decoder and a second semiconductor chip having a logic circuit, the logic circuit includes one selection circuit connected to the decoder of all the first semiconductor chipsand configured to select addresses of a first memory blockA that stops input/output and a second memory blockB that performs input/output instead among the plurality of memory blocks, and the addresses of the selected first memory blockA and the selected second memory blockB are each common to all the first semiconductor chips.

Semiconductor device and control method thereof

This semiconductor device includes a memory semiconductor chip having a plurality of memory cells, a planar buffer chip which is a semiconductor chip that comprises a plurality of buffer circuits which hold data read from the memory cell and data written to the memory cell and which output the held data in accordance with the number of bit lines of the plurality of memory cells, an electrical connection structure which electrically connects the bit lines of the memory cells of the memory semiconductor chip and the buffer circuits of the planar buffer chip to each other in a thickness direction of the memory semiconductor chip and the planar buffer chip, and a plurality of bit wiring layers provided in accordance with the respective buffer circuits and electrically connected to the bit lines of the buffer circuits. The bit wiring layers are laminated on the planar buffer chip.

Semiconductor device

This semiconductor device includes a memory semiconductor chip in which a plurality of memory cells are laminated on a semiconductor substrate, a planar buffer chip which is a semiconductor chip that comprises a plurality of buffer circuits which hold data read from the memory cell and data written to the memory cell and which output the held data in accordance with the number of bit lines of the plurality of memory cells, and an electrical connection structure which electrically connects the bit lines of the memory cells of the memory semiconductor chips and the buffer circuits of the planar buffer chips to each other in a thickness direction of the memory semiconductor chip and the planar buffer chip. The electrical connection structure electrically connects the bit lines of the plurality of memory cells in the thickness direction through a penetration electrode penetrating at least the plurality of memory cells in the thickness direction.

Semiconductor device comprising memory semiconductor chip in which memory cell is laminated on semiconductor substrate

A semiconductor apparatus according to an embodiment of the present invention includes: a plurality of semiconductor chips that are laminated; and a plurality of penetration electrodes that penetrate in a lamination direction through the plurality of semiconductor chips and that electrically connect together the plurality of semiconductor chips, wherein a semiconductor chip has at least one sub-memory array, and a penetration electrode penetrates through an outer circumferential part of the sub-memory array.

Semiconductor apparatus including penetration electrodes connecting laminated semiconductor chips

A semiconductor apparatus according to an embodiment of the present invention includes: a plurality of semiconductor chips that are laminated; a plurality of penetration electrodes that penetrate in a lamination direction through the plurality of semiconductor chips and that electrically connect together the plurality of semiconductor chips; and a plurality of input/output elements that are configured to perform a signal input/output operation to the plurality of penetration electrodes, wherein the semiconductor chips are joined together via no bump, one of the plurality of input/output elements is connected to each of the plurality of penetration electrodes such that a functional element connected to each of the plurality of penetration electrodes performs an ON or OFF operation at a predetermined timing, and the input/output element connected to a first of two adjacent penetration electrodes among the plurality of penetration electrodes and the input/output element connected to a second of two adjacent penetration electrodes are configured to perform the signal input/output operation at a different timing from each other.

Growing community of inventors

Tokyo, Japan

Takayuki Ohba