Hitachi, Ltd.

Babcock-hitachi Kabushiki Kaisha

Sumitomo Chemical Company, Limited

Hitachi Kyowa Kogyo Co., Ltd.

Takayuki Numata

Koichi Kurosawa

Shigeo Hattori

Hideyo Saito

Takenori Shindo

Hajime Fujikura

Taichiro Konno

Shusei Nemoto

There is provided a substrate processing apparatus, comprising: a substrate placing table which is provided to at least one of the temperature elevating part and the temperature lowering part formed in a container, and which causes heat-transfer to occur with the substrate placed on a placing surface; and a temperature control part which controls a temperature of the substrate placing table, wherein the temperature control part is configured to: control the temperature of the substrate placing table so that the temperature of the substrate to be loaded into the processing part is elevated to a predetermined temperature, before the substrate is placed on the substrate placing table, when the substrate placing table is provided to the temperature elevating part; and control the temperature of the substrate placing table so that the temperature of the processed substrate unloaded from the processing part is lowered to a predetermined temperature, before the substrate is placed on the substrate placing table, when the substrate placing table is provided to the temperature lowering part.

Substrate processing apparatus and substrate processing method

A part of an ICM housing including a portion to be repaired, welded to a wall of a reactor pressure vessel in operation, is cut and removed and a new ICM housing half is welded to the remaining part of the ICM housing to form a new ICM housing. The new ICM housing is provided at the welding portion thereof with a molten metal layer containing 4 wt % or more .delta. ferrite. A sleeve made of stainless steel is located at the welding portion of an inner peripheral surface of the new ICM housing made so as to be molten by a TIG welding machine to form the molten metal layer, with the molten metal layer preventing stress corrosion cracking of the new ICM housing.

Method and structure for repairing an elongated metal hollow member

An ICM housing welded to a wall of a reactor pressure vessel in operation is provided with a molten metal layer containing 4 wt. % or more .delta. ferrite at a portion of an inner peripheral surface thereof which corresponds to a weld. A sleeve made of stainless steel is located at the competent portion of the inner peripheral surface of the ICM housing stainless steel so as to be molten by means of a TIG welding machine to form the molten metal layer. The molten metal layer prevents stress corrosion cracking of the ICM housing.

Method and structure for preventive maintaining an elongated metal

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Hitachi, Japan

Takayuki Numata