Fujifilm Corporation

Takayuki Naono

Takamichi Fujii

Yoshikazu Hishinuma

Takami Arakawa

Takahiro Sano

Keisuke Aoshima

Jeffrey Birkmeyer

Youming Li

Yuuichi Okamoto

Yasukazu Nihei

Yosuke Nishiura

Takehiro Kasahara

Takuma Nakano

Yoshinori Katoh

Yoshiki Morita

Ryosuke Ozawa

Masaaki Abe

A micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a movable frame that is connected to the first support portion; a second support portion that swingably supports the mirror portion, the first support portion, and the movable frame around a second axis; a pair of first actuators that are connected to the second support portion and face each other across the second axis; a second actuator that surrounds the first actuator; a first connecting portion that connects the first actuator and the second actuator; a fixed frame that surrounds the second actuator; and a second connecting portion that connects the second actuator and the fixed frame. The second actuator applies rotational torque around the first axis to the mirror portion. The first actuator applies rotational torque around the second axis to the movable frame.

Micromirror device and optical scanning device

An optical scanning device causes a mirror portion to perform a spiral rotation operation with a first driving signal applied to a first actuator and a second driving signal applied to a second actuator as cyclic voltage signals. In a case where a resonance frequency and a resonance Q value of a resonance mode, among resonance modes accompanied by mirror tilt swing around a first axis, closest to a frequency of the cyclic voltage signal are respectively set as fand Q, a resonance frequency and a resonance Q value of a resonance mode, among resonance modes accompanied by mirror tilt swing around a second axis, closest to the frequency of the cyclic voltage signal are respectively set as fand Q, and the frequency of the cyclic voltage signal is f, a relationship of Q≠Q, F<f, and f×(1−1/(1.2×Q))≤f≤f×(1+1/(6×Q)) is satisfied.

Optical scanning device and control method thereof

In a micromirror device, in a case where a resonance frequency around a first axis is denoted by fand a resonance frequency around a second axis is denoted by f, a relationship of f<fis satisfied, and in a case where a mirror portion is driven around the first axis and the second axis simultaneously, the resonance frequency around the first axis changes by Δf from f. A first driving signal and a second driving signal each having a driving frequency fsatisfying a relationship of f−Δf<fare provided to a first actuator and a second actuator, respectively, to cause the mirror portion to perform precession.

Optical scanning device and method of driving micromirror device

A resonance mode of one lower order than a basic resonance mode closest to a frequency of a cyclic voltage signal exists in at least any one of a plurality of resonance modes accompanied by a mirror tilt swing around a first axis or a plurality of resonance modes accompanied by the mirror tilt swing around a second axis. In a case where a resonance frequency of one higher order from a frequency of the basic resonance mode is f, a ratio of a first voltage level to a second voltage level which is a maximum voltage level value in the entire frequency range among frequency components of the cyclic voltage signal is satisfied to be −55 dBV or less, where a maximum voltage level value in a frequency range of (1± 1/20)×fand a frequency range of (1± 1/20)×famong the frequency components of the cyclic voltage signal is the first voltage level for an axis in which the lower-order resonance mode exists among the first axis and the second axis, and a maximum voltage level value in the frequency range of (1± 1/20)×Camong the frequency components of the cyclic voltage signal is the first voltage level for an axis in which the lower-order resonance mode does not exist among the axes.

In a micromirror device, the upper electrode of the piezoelectric element consists of a plurality of individual electrode parts, each of which is separated by a first stress inversion region and a second stress inversion region. In the first stress inversion region, positive and negative, of a principal stress component having a maximum absolute value among a principal stress, are inverted in a maximum displacement state, in a case of driving in a first resonance mode in which the mirror part is tilted and oscillated around the first axis. In the second stress inversion region, positive and negative, of a principal stress component having a maximum absolute value among a principal stress, are inverted, in a case of driving in a second resonance mode in which the mirror part is tilted and oscillated around the second axis.

Micromirror device

A micromirror device includes: a mirror part; a first actuator in which a pair of semi-annular actuator parts surrounds the mirror part; a connecting part that connects the mirror part and the first actuator such that the mirror part is rotatable around a first axis; a fixing part that is disposed at an outer periphery of the first actuator; and a second actuator in which a pair of meandering type actuator parts are disposed with the first actuator interposed therebetween. Each of the pair of meandering type actuator parts is disposed such that a longitudinal direction of the rectangular plate-like part is a direction along the first axis, one end of each meandering type actuator part is connected to an outer periphery of each of the pair of semi-annular actuator parts, and another end of each meandering type actuator part is connected to the fixing part.

A piezoelectric device and a manufacturing method thereof in which a piezoelectric film formed of a thin film of a lead zirconate titanate-based perovskite oxide is formed on a substrate, and at least a first region out of the first region and a second region of the piezoelectric film is irradiated with electromagnetic waves having a wavelength of 230 nm or less in a reducing atmosphere to provide a difference in piezoelectric characteristics between the first region and the second region so that the first region has a smaller absolute value of a piezoelectric constant dand a smaller dielectric loss tan δ than the second region.

Piezoelectric device and method of manufacturing piezoelectric device

A micromirror device includes: a mirror portion that has a reflective surface reflecting incident light; a first actuator that has an annular shape and is disposed around the mirror portion; a second actuator that has an annular shape and is disposed around the first actuator; a first connection portion that connects the mirror portion and the first actuator on a first axis, which is in a plane including the reflective surface of the mirror portion in a stationary state, and that rotatably supports the mirror portion around the first axis; a second connection portion that connects the first actuator and the second actuator on a second axis, which is in a plane including the reflective surface of the mirror portion in a stationary state and is orthogonal to the first axis, and that rotatably supports the first actuator around the second axis; a third connection portion that is connected to an outer circumference of the second actuator on the second axis; and a fixed portion that is connected to the third connection portion, and supports the second actuator through the third connection portion.

Micromirror device and method of driving micromirror device

The piezoelectric microphone chip includes a single thin plate, a diaphragm support structure that is provided on one surface of the thin plate and includes an outer edge support portion that supports an outer edge of the thin plate and a separation support portion that separates the thin plate into a plurality of diaphragms in association with the outer edge support portion, a single or a plurality of piezoelectric conversion portions formed by laminating a first electrode, a piezoelectric film, and a second electrode sequentially from a diaphragm side on each of the diaphragms, and a signal detection circuit that detects outputs from the piezoelectric conversion portions provided on the plurality of diaphragms, and a relationship among a thickness tof the outer edge support portion, a thickness tof the separation support portion, and a thickness td of the thin plateis set to 13.3&#xd7;td&#x3c;t&#x3c;t&#x2212;20 &#x3bc;m.

Piezoelectric microphone chip and piezoelectric microphone

Provided are a piezoelectric element having high stability, which operates with high efficiency, and a method for manufacturing the piezoelectric element. The piezoelectric element () has a laminate structure in which a first electrode (), a first piezoelectric film (), a second electrode (), an adhesion layer (), an interlayer (), a third electrode (), a second piezoelectric film (), and a fourth electrode () are laminated in this order on a silicon substrate (). The interlayer () is formed of a material different from that of the second electrode () and has a thickness of 0.4 &#x3bc;m to 10 &#x3bc;m. A device having a diaphragm structure or a cantilever structure is formed by removing a part of the silicon substrate (). The respective layers (to) laminated on the silicon substrate () can be formed using a thin film formation method represented by a vapor phase epitaxial method.

Piezoelectric element and method for manufacturing piezoelectric element

A piezoelectric element is obtained using a method including: preparing a first structure; preparing a second structure; disposing a first facing electrode layer of the first structure to face a first surface of a vibration plate substrate and bonding the first structure to the first surface of the vibration plate substrate; processing the vibration plate substrate into a vibration plate by polishing or etching a second surface of the vibration plate substrate to which the first structure is bonded; preparing a laminate structure by disposing a second facing electrode layer of the second structure to face an exposed surface of the vibration plate and bonding the second structure to the vibration plate; and removing at least a part of a first silicon substrate of the first structure and a second silicon substrate of the second structure from the laminate structure.

Laminate structure, piezoelectric element, and method of manufacturing piezoelectric element

A piezoelectric microphone includes a plate, a support portion that is provided around the plate, connection portions that connect the plate and the support portion on two or more sides of the plate, and a detection portion including a lower electrode, a piezoelectric film, and an upper electrode which are stacked in this order. The detection portion is stacked on the connection portion . An inflection point of a cross-sectional deformation curve in a case in which the plate and the connection portion are deformed by sound pressure is present in a region in which the detection portion is not stacked.

Piezoelectric microphone

A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. Upper electrodes and lower electrodes of the first actuator part and the second actuator part are divided to correspond to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, a piezoelectric portion corresponding to positions of a first piezoelectric conversion part and third piezoelectric conversion parts and a piezoelectric portion corresponding to positions of second piezoelectric conversion parts and a fourth piezoelectric conversion part generate stresses in opposite directions.

Mirror driving device and driving method thereof

A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. The first actuator part has a first electrode part and second electrode parts. The second actuator part has third electrode parts and a fourth electrode part. The arrangement of the each electrode part constituting an upper electrode corresponds to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, and a piezoelectric portion corresponding to positions of the first electrode part and the third electrode parts and a piezoelectric portion corresponding to positions of the second electrode parts and the fourth electrode part generate stresses in opposite directions.

Provided is an ultrasonic cutting element including a blade arm having a primary vibration plate and a blade portion fixed to one end of the primary vibration plate, a counter mass arm including one or more secondary vibration plates, a holding member to which vibration ends of the blade arm and the counter mass arm are respectively connected and which holds the blade arm and the counter mass arm in parallel, and a driving portion being a piezoelectric actuator that imparts ultrasonic vibrations to at least one of the primary vibration plate or the secondary vibration plate, in which the blade arm and the counter mass arm respectively bending-vibrate in a primary surface direction in a resonant mode in which the arms vibrate in mutually opposite phases as flexural vibrators.

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Kanagawa, Japan

Takayuki Naono