Shin-etsu Polymer Co., Ltd.

Takayuki Nakayama

Atsushi Sumi

Junya Toda

Masato Hosoi

Atsusi Sumi

Provided is a panel storage container that can suppress flexure of the middle portions of the panels. A panel storage container has: a container body for storing panels; and a panel support means for supporting the panels. The panel support means has: a panel support portion for supporting right and left edges of the panels; a central support portion for supporting each middle portion of the panels; and elastic bodies for contacting the panels, the elastic bodies being provided along a front and rear direction of the central support portion at a predetermined interval.

Panel storage container

A substrate storage container includes: a container body of a front open box type for holding a multiple number of semiconductor wafers supported in alignment by supporting ribs; a bottom plate removably attached to the bottom of the container body; and a pair of conveyor contact rails integrally formed along both the left and right sides of this bottom plate. These conveyor contact rails inhibit vibrations and impacts acting on the semiconductor wafers when the sealed container body is conveyed by a conveyor.

Substrate storage container

When the position of a substrate is shifted, the substrate is made to return to an original position by enabling the position of the substrate to be controlled using an elastic piece which protrudes inside from a vertical direction part of a frame. Further, a coupling piece is provided extending in a vertical direction and having both ends thereof coupled to a horizontal direction part of the frame, and a protruding part protruding inside a substrate container is provided on the coupling piece. Then, this protruding part is configured to have an inclined face which is inclined in a direction intersecting the substrate and enabled to come into contact with the periphery of the substrate, and thereby this inclined face guides the substrate to reduce the friction of the substrate and to control the position of the substrate.

Retainer and substrate storage container provided with same retainer

A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

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Itoigawa, Japan

Takayuki Nakayama