Nikon Corporation

Takayuki Morita

Akitoshi Suzuki

Tomoko Kobayashi

Keita Masuda

Katsuya Watanabe

The total internal reflection microscope has an illumination optical system that relays light from a light source with a relay optical system, forms an image of the light source on the incident pupil plane of the objective lens and irradiates a sample with the illumination light via an objective lens, has an angle adjustment mirror for changing the position of the image of the light source in a direction orthogonal to the optical axis, an optical detector for detecting the intensity of the returning illumination light reflected by the sample and collected by the objective lens, and a controller for determining the operation amount of the angle adjustment mirror, wherein the controller determines the operation amount of the angle adjustment mirror so that the illumination light is totally reflected at the sample based on the change in intensity of the returning light when the angle adjustment mirror is changed.

Total internal reflection microscope

An immersion microscope objective lens of the present invention has: in order from an object, a first lens group Ghaving positive refractive power and having a cemented lens of a plano convex lens having a plane facing the object and a meniscus lens having a concave surface facing the object, and a single meniscus lens having a convex surface facing the object; a second lens group having positive refractive power and having a plurality of cemented lenses; and a third lens group having negative refractive power and having a cemented meniscus lens having a concave surface facing an image, and a cemented meniscus lens having a concave surface facing the object. And the following conditional expressions 0.12&#x3c;df&#x3c;0.25, 0.04&#x3c;&#x3b8;Ct(p)&#x2212;&#x3b8;Ct(n)&#x3c;0.09 and &#x2212;0.03&#x3c;&#x3b8;hg(p)&#x2212;&#x3b8;hg(n)&#x3c;0.00 are satisfied.

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Fujisawa, Japan

Takayuki Morita