Alps Electric Co., Ltd.

Takayuki Minagawa

Yukihiro Gorai

Koji Nishimura

Katsuya Kikuiri

Hisanobu Okawa

Tetsuya Fukuda

Takuya Adachi

A semiconductor pressure sensor includes a cavity disposed in one silicon substrate of a SOI substrate having two silicon substrates bonded to each other with an oxide film therebetween and a diaphragm formed from the other silicon substrate and the oxide film, wherein the oxide film, bordering the cavity, of the diaphragm includes an arc-shaped section at the boundary portion to the one silicon substrate defining the inner wall side surface of the cavity, the arc-shaped section having the same width as the width of the cavity at a desired section in the one silicon substrate and reducing the width of the cavity from the boundary portion toward the diaphragm center.

Semiconductor pressure sensor

Pressure sensor

Growing community of inventors

Niigata-ken, Japan

Takayuki Minagawa