Tokyo Electron Limited

Takayuki Kita

Motoi Okada

Junya Sato

Takuro Tsutsui

Nao Akashi

Atsushi Suzuki

Kei Sano

Kiwamu Tsukino

Yuta Haga

Hiroyuki Sato

According to an aspect of the present disclosure, a substrate state determining apparatus includes: an image capturing unit that captures an image of a substrate placed on a stage; a learning unit that executes a machine learning using training data in which information indicating a state of the substrate is attached to the image of the substrate, so as to generate a substrate state determination model in which the image of the substrate is taken as an input and a value related to the state of the substrate corresponding to the image of the substrate is taken as an output; and a determination unit that determines the state of the substrate corresponding to the image of the substrate captured by the image capturing unit, using the substrate state determination model generated by the learning unit.

Substrate state determining apparatus, substrate processing apparatus, model generating apparatus, and substrate state determining method

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Sapporo, Japan

Takayuki Kita