Seiko Epson Corporation

Ngk Insulators, Inc.

Seiko Npc Corporation

Epson Toyocom Corporation

Takayuki Kikuchi

Takao Soma

Yukihisa Osugi

Shosaku Gouji

Ryuta Nishizawa

Seiichiro Ogura

Keiichi Yamaguchi

Kazuyuki Nagata

Kensaku Isohata

Yoshinao Yanagisawa

Shigeki Hayashi

Seiji Ishikawa

Seiji Osawa

Masahiro Oshio

Keiji Nakagawa

Masashi Shimura

Masayuki Takahashi

Toshihiro Nishida

Kei Kanemoto

Takemi Yonezawa

Yusuke Kinoshita

Masahiro Ishii

Mitsuhiro Tateyama

Akinori Yamada

Teruo Takizawa

Makoto Furuhata

Shinya Aoki

Atsushi Matsuo

Makoto Tani

Shuhei Yoshida

Osamu Kawauchi

Fumio Ichikawa

Hideto Naruse

Yoshio Morita

Norifumi Shimizu

Yoichi Okumura

Yuji Fujiwara

Toshihiko Shiohara

Yuichi Isono

Norifumi Shimisu

An angular velocity sensor includes a substrate, a detector including a movable detection electrode and a fixed detection electrode opposed to the movable detection electrode, and a driver adapted to drive the detector. The movable detection electrode is supported by a first spring that is elongated parallel to a Y axis from a first turned-back part, and a second spring that is elongated parallel to the Y axis from a second turned-back part. The first and second springs are fixed at first and second anchors. The first turned-back part is closer to the second spring than the first anchor. The detector includes a first surface opposed to the first spring, and a second surface disposed closer to the first spring than the first surface.

Angular velocity sensor, electronic apparatus, and vehicle

A physical quantity sensor includes a substrate, a movable body that includes a movable drive electrode, a movable detection electrode, and a connection portion for connecting the movable drive electrode and the movable detection electrode and is allowed to vibrate along a first axis with respect to the substrate, a fixed drive electrode that is fixed to the substrate, is disposed to face the movable drive electrode, and vibrates the movable body along the first axis, and a fixed monitor electrode that is fixed to the substrate, is disposed to face the movable detection electrode and detects vibration of the movable body along the first axis.

Physical quantity sensor, inertia measurement device, vehicle positioning device, electronic apparatus, and vehicle

A horizontal articulated robot includes a base, a first arm coupled to the base and configured to turn around a first axis, a second arm coupled to the first arm and configured to turn around a second axis parallel to the first axis, a third arm coupled to the second arm and configured to turn around a third axis parallel to the first axis and move along the third axis, a motor provided in the second arm and configured to drive the third arm, and a force detecting section provided between the motor and the second arm and configured to detect reaction generated by driving the motor.

Horizontal articulated robot and robot system

A physical quantity sensor includes a drive vibrator, a detection vibrator, and an elastic deformation portion disposed between the drive vibrator and the detection vibrator and elastically deformable along a first axis in which the drive vibrator and the detection vibrator are aligned, in plan view, and in which the drive vibrator and the detection vibrator vibrate in reverse phases along the first axis. The drive vibrator and the detection vibrator vibrating alternately repeat approaching and separating from each other along the first axis.

Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle

A circuit device adapted to perform detection of angular velocity observed by a capacitance type angular velocity transducer includes a drive device, a detection device, a vibration frequency controller adapted to variably control at least one of a detection frequency and a drive frequency of the capacitance type angular velocity transducer, and a storage adapted to store a correction parameter group adapted to correct a sensor characteristic of the capacitance type angular velocity transducer due to a variation of at least one of the detection frequency and the drive frequency.

Circuit device, physical quantity detection device, electronic apparatus, and vehicle

A gyro sensor includes: a substrate; a fixed portion that is fixed to the substrate; a driving portion that is driven in a first direction oriented along a first axis; a mass portion that is connected to the driving portion and is displaced in the first direction; and an elastic portion that is connected to the mass portion and the fixed portion. The mass portion includes a detection portion that is displaceable in a second direction oriented along a second axis orthogonal to the first axis by a Coriolis force to act. An outer circumference surface of the elastic portion includes a main surface, a side surface, and a connection surface connecting the main surface to the side surface. The connection surface has a curved surface portion with a curved surface shape.

Gyro sensor, method of manufacturing gyro sensor, electronic apparatus, and vehicle

An oscillator includes a container, an oscillation element housed in the container, a heating circuit housed in the container, and adapted to control a temperature of the oscillation element, a temperature detection circuit housed in the container, a temperature control circuit housed in the container, and adapted to control the heating circuit based on an output of the temperature detection circuit, at least one connecting wire housed in the container, and electrically connects a ground of the temperature detection circuit and a ground of the temperature control circuit to each other, and a ground external terminal disposed on an outer surface of the container, and electrically connected to the ground of the temperature detection circuit and the ground of the temperature control circuit.

Oscillator, electronic apparatus, and vehicle

A package includes a base member and a first projecting portion that projects from one surface of the base member. The first projecting portion contacts a first substrate on which an electronic component is mounted, and has an insulating property.

Electronic component package, oscillator, electronic apparatus, and base station

A gyro sensor includes: a substrate; a first drive section; and a first detection section and a second detection section that detect angular velocity. The first detection section includes a first movable body including a first movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a first fixed electrode fixed to the substrate and facing the first movable electrode. The second detection section includes a second movable body including a second movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a second fixed electrode fixed to the substrate and facing the second movable electrode. The first movable body and the second movable body are coupled together by a first coupling section.

Gyro sensor, electronic apparatus, and vehicle

An oscillator includes an oscillation source, multiple temperature control elements, and a controller adapted to perform control to suppress an increase in current consumed in one or more of the temperature control elements during at least part of a period from when operation of the oscillation source initiates to when the oscillation source reaches a specified temperature.

Oscillator, electronic apparatus, and base station

A resonator element includes an SC-cut quartz crystal substrate having a thickness t, and an excitation electrode disposed on a principal surface of the quartz crystal substrate, the principal surface being square or rectangular in shape, a side of which has a length L, 28&#x2264;L/t&#x2264;60 is satisfied.

Resonator element, method of manufacturing resonator element, oscillator, electronic apparatus, moving object, and base station

An electronic component manufacturing method, in which a notch and a concave portion are formed in a substrate, includes forming an etching mask in which a maximum width of a first mask portion which forms a width between two side surfaces of the concave portion along a longitudinal direction, when the substrate is seen in a plan view from a direction perpendicular to a surface of the substrate having the concave portion formed therein, is smaller than a width of a second mask portion which forms a minimum width of an opening of the notch, and forming the notch and the concave portion by performing dry etching processing on the substrate.

Electronic component manufacturing method, vibrator device, electronic apparatus, and vehicle

Growing community of inventors

Okaya, Japan

Takayuki Kikuchi