Hitachi Astemo Ltd.

Takayuki Ishikawa

Takahiro Miki

Akira Uenodan

Naoki Saito

Nobuaki Gorai

Masamichi Nakamura

Satoshi Noda

Provided is a physical quantity detection device capable of improving noise performance of a flow rate detection unit as compared with the related art. The physical quantity detection deviceincludes a plate-like chip packagethat is arranged to protrude from the flow path of the measurement target gas and has a width W along the flow direction of the measurement target gas. The chip packageincludes a flow rate detection unit, an accelerating flow path, a measurement surface, a non-measurement surface, and a separation flow portion. The cross sectional area of the accelerating flow pathis reduced, and the flow rate detection unitis arranged. The separation flow portionpartitions the second sub-passageinto a measurement flow path facing the measurement surfaceand a non-measurement flow path facing the non-measurement surface. In the width direction Dw of the chip package, the end portionof the accelerating flow pathand the end portionof the separation flow portionare separated from each other.

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Hitachinaka, Japan

Takayuki Ishikawa