Central Glass Company, Limited

Takayuki Ishibashi

Shinsuke Nakagawa

Motoyasu Nishimura

Isami Fujioka

Kazutoshi Imada

A process for treating NF useful as a dry etching gas and cleaning gas in processes for producing LSI, TFT, and solar cell and in an electron photographic processes. The treating process comprises following step: (a) preparing a reactor including agitator blades for agitating gas in the reactor and generating a flow of the gas, and a gas flow guide tube for efficiently circulating and dispersing the gas flow generated by the agitator blades in a space of the reactor; (b) stationarily placing at least one substance selected from the group consisting of a metal and a metal compound within a reactor, the metal being at least one metal selected from the group consisting of Si, B, W, Mo, V, Se, Te and Ge, the metal compound being at least one metal compound selected from the group consisting of solid compounds of Si, B, W, Mo, V, Se, Te and Ge: (c) introducing a gas containing NF into the reactor to react the introduced gas with at least one substance of the metal and the metal compound at a temperature ranging from 400 to 900&deg; C. upon operating the agitator blades of the reactor so as to form a fluoride gas; and (d) capturing the fluoride gas.

NF3 treating process

A nonexplosive chemical composition for gently and noiselessly breaking a rock or concrete mass. The composition comprises a principal component which is prepared by calcining a starting mixture comprising 100 parts by weight of quick lime and 1-20 parts by weight of calcium fluoride. In rock or concrete breaking operations, this composition in the form of aqueous slurry is poured into drill-holes and left to spontaneously hydrate and set with development of expansion pressure. For adequate retardation of the hydration, preferably a second fluoride such as Na.sub.2 SiF.sub.6 which gives CaF.sub.2 by reaction with CaO at the calcination temperature is added to the starting mixture. As an alternatively preferable method for the same purpose, an amino acid compound and/or a lignosulfonate is used as a hydration retarding agent which is mixed with the calcined principal component. Various auxiliary agents may optionally be added to this composition.

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Yamaguchi, Japan

Takayuki Ishibashi