Alps Electric Co., Ltd.

Takayuki Imaoka

Tadahiro Ohmi

Yasuhiko Kasama

Masayuki Toda

Kenichi Mitsumori

Akira Abe

Oh Eui Yeol

The wet treatment liquid feed nozzle of the invention comprises an introducing path having an introducing port, a discharging path having a discharging port, a crossing section formed by causing the introducing path and the discharging path to cross at the other ends thereof, a nozzle assembly having an opening section opening to an object to be treated, provided at the crossing section, and pressure control means, for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated and the atmospheric pressure provided at least on the discharging path side so that the wet treatment liquid having been in contact with the object to be treated via the opening section does not flow to outside the discharging path.

Liquid feed nozzle, wet treatment apparatus and wet treatment method

The wet treatment liquid feed nozzle of the invention comprises an introducing path,having an introducing port,a discharging path,having a discharging port,a crossing section,formed by causing the introducing path,and the discharging path,to cross at the other ends thereof, a nozzle assembly,having an opening section,opening to an object to be treated,provided at the crossing section,and pressure control means,for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated,and the atmospheric pressure provided at least on the discharging path,side so that the wet treatment liquid having been in contact with the object to be treated,via the opening section,does not flow to outside the discharging path

Liquid feed nozzle, wet treatment, apparatus and wet treatment method

Growing community of inventors

Tokyo, Japan

Takayuki Imaoka