Toto Ltd.

Takayuki Ide

Masami Ando

Masakatsu Kiyohara

Takero Tokizono

Hiromi Arimitsu

Kazuki Amano

Disclosed is a process for producing a RBSiC member that has a large size and a complicated shape and possesses ceramic properties. The process is Selective Laser Sintering process which includes providing a raw material containing silicon carbide particles and a binder, forming a thin layer of the raw material, and sintering the thin layer by irradiating a desired area in the thin layer with laser to form a sintered thin layer, repeating the step of forming the sintered thin layer to obtain a green body, impregnating the green body with a carbon source and curing the green body impregnated with the carbon source to give a cured body, carbonizing an organic compound component in the cured body to give a fired body, and infiltrating the fired body with silicon and subjecting the fired body to reaction sintering to give a RBSiC member, wherein the fired body contains 8% to 30% by weight of carbon.

Process for producing reaction bonded silicon carbide member

This producing method includes: a preparing step of preparing a pair of ceramic sintered bodies at least one of which is formed by a reaction sintering method and contains free silicon; a forming step of interposing a joining slurry between the joined surfaces of the pair of ceramic sintered bodies and thereafter drying the joining slurry, to form a fine particle layer, the joining slurry obtained by dispersing fine particles containing a carbon element in an organic solvent; and a joining step of heating the pair of ceramic sintered bodies in an inert atmosphere with the pair of ceramic sintered bodies held so that the fine particle layer is pressurized, to introduce the free silicon into the fine particle layer, thereby forming a joining layer containing at least silicon carbide so that the pair of ceramic sintered bodies are joined to each other, to obtain the ceramic joined body.

Method for producing ceramic joined body

A corrosion-resistant member includes a ceramic member containing yttrium oxide as a main component, containing cerium element, and obtained by firing under a nonoxidizing atmosphere. The corrosion-resistant member that has high corrosion-resistant characteristics and includes a ceramic member having a low volume resistivity can be provided.

Corrosion-resistant member and method of manufacturing same

A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.

Ceramic member and corrosion-resisting member

A rare-earth oxide sintered body, or corrosion-resistant material, having low sintering temperature and high density is prepared by adding a boron compound at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (BO) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, after which the mixed powder is formed and sintered. The sintered body comprises at least one of LaO, NdO, SmO, EuO, GdO, DyO, HoO, ErO, TmO, YbO, LuO, and ScO, and at least one of LnBO(Ln=La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, and Lu), and ScBOas a main constituent crystal thereof.

Rare-earth oxide sintered body and manufacturing method

The present invention provides a method of manufacturing an yttria (YO) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a YOcrystal and a YBOcrystal are included as the constituent crystal thereof. In production of the yttria sintered body, a boron oxide (BO) of 0.02 wt % to 10 wt % is added to an yttria (YO) powder, the mixed powder is formed, and thereafter sintered at 1300-1600&#xb0; C.

Corrosion-resistant material manufacturing method

The object of the present invention is to provide a rare-earth oxide sintered body having low sintering temperature and high density. A boron compound is added at a ratio of 0.06 mol % or more and less than 25 mol % when converted into boron oxide (BO) to oxide powder of at least one of La, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, and Sc, the mixed powder is formed and sintered.

Rare-earth sintered body and manufacturing method

The object of the present invention is to provide an yttria (YO) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a YOcrystal and a YBOcrystal are included as the constituent crystal thereof. In order to produce the yttria sintered body, a boron oxide (BO) of 0.02 wt % to 10 wt % is added to an yttria (YO) powder, the mixed powder is formed, and thereafter sintered at 1300-1600&#xb0; C.

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Fukuoka, Japan

Takayuki Ide