Teijin Limited

Takayoshi Numata

Kiyoshi Sugie

Satoshi Yamamoto

En Lai Zhang

The present invention relates to a silicon wafer carrier consisting of a composition composed of (a) 100 parts by weight of a polyester, (b) 5 to 100 parts by weight of a polyether ester amide, (c) 10 to 2,500 ppm (based on the polyether ester amide) of an alkaline metal and (d) 0 to 40 parts by weight of a modified polyolefin, generating not more than 10 ppm of volatile gas by the heat-treatment at 150&deg; C. for 60 minutes and eluting not more than 10 ppm of the alkaline metal by the immersion treatment in pure water at 80&deg; C. for 120 minutes. The silicon wafer carrier has the generation of volatile gas and the elution of metal suppressed to an extent not to essentially cause the surface contamination of a silicon wafer and is provided with excellent permanent antistaticity and high mechanical properties and heat-resistance.

Silicon wafer carrier

A resin composition exhibiting excellent antistaticity and static charge dissipating performance and having extremely small variations of antistatic properties (saturated static voltage and half-life period of static voltage) on the surface of a molded article and a transportation jig for electronic field made of the above resin composition are provided by using a resin composition produced by compounding (A) 100 parts by weight of a thermoplastic resin with (B) 1 to 30 parts by weight of a carbon fiber having a diameter of 1 nm to 1 &mgr;m, a length of 1 &mgr;m to 3 mm and a volume resistivity of smaller than 1 &OHgr;cm and (C) 5 to 200 parts by weight of an antistatic polymer having a surface resistivity of 10 to 10 &OHgr; (measured under impressed voltage of 500V), a melting point of 100&deg; C. or above, an apparent melt viscosity of 10 to 1,000 Pa&middot;s at apparent shear rate of 1,000 sec at 260&deg; C. and an apparent melt viscosity ratio of the antistatic polymer to the thermoplastic resin of 0.01 to 1.3 under the above condition.

Resin composition and jig for use in transportation

A destaticizing thermoplastic resin composition compristing

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Chiba, Japan

Takayoshi Numata