Fujimi Incorporated

Tokyo Electron Limited

Tocalo Co., Ltd.

Takaya Masuda

Hiroyuki Ibe

Nobuyuki Nagayama

Hiroaki Mizuno

Tatsuo Suidzu

Takeshi Takabatake

Noriyuki Yasuo

Kazuya Sugimura

Tatsuya Kuno

Kazuyuki Tsuzuki

Kazuto Sato

Provided is thermal spray slurry capable of forming a dense coating by thermal spraying while suppressing cracks. Thermal spray slurry includes: thermal spray particles having an average particle diameter of 1 &#x3bc;m or more and 10 &#x3bc;m or less and a dispersion medium in which the thermal spray particles are dispersed, and has a filling rate of 84 mass % or less, the filling rate being calculated by the following expression,filling rate (mass %)=&#xd7;100,

Thermal spray slurry

Provided is a thermal spray material that can form a compact thermal sprayed coating having an enhanced plasma erosion resistance. The herein disclosed art provides a thermal spray material that contains a rare earth element (RE), oxygen (O), and a halogen element (X) as constituent elements and that contains a mixed crystal of a rare earth element oxyhalide (RE-O&#x2014;X) and a rare earth element halide (REX).

Thermal spray material and thermal spray coated article

To provide thermal spray slurry capable of forming a thermal sprayed coating having a high adhesion strength on a thermal spray target surface of a substrate, disclosed is thermal spray slurry for forming a thermal sprayed coating on the thermal spray target surface by spraying the thermal spray slurry on the thermal spray target surface of the substrate, the thermal spray slurry containing: thermal spray particles having a 50% particle diameter D50 equal to or larger than 1 &#x3bc;m and equal to or smaller than 5 &#x3bc;m in volume-based cumulative particle diameter distribution; and a dispersion medium in which the thermal spray particles are dispersed. In addition, a ratio D10/Ra between a surface roughness Ra (unit: &#x3bc;m) of the thermal spray target surface and a 10% particle diameter D10 (unit: &#x3bc;m) of the thermal spray particles in the volume-based cumulative particle diameter distribution satisfies a formula '0.4&#x3c;D10/Ra&#x2264;0.9'.

Thermal spray slurry and method of forming thermal sprayed coating

A thermal spray powder is provided that contains, as constituent elements, a first element selected from W and Mo; a second element selected from Co, Ni, and Fe; a third element selected from C and B; and a fourth element formed of Si. The amount of the second element in the thermal spray powder is 40% by mole or less. The mole ratio of the fourth element to the second element in the thermal spray powder is 0.002 or greater and 0.03 or less. The thermal spray powder has a crystal phase containing Co, Ni, or Fe; W; and C or a crystal phase containing Co, Ni, or Fe; W or Mo; and B. In an X-ray diffraction spectrum of the thermal spray powder, the peak intensity attributed to Co, Ni, or Fe is at most 0.1 times the largest peak intensity in the same X-ray diffraction spectrum.

Powder for thermal spray, thermal spray coating film, coating film and roll in molten metal bath

A thermal spray powder is provided that contains, as constituent elements, a first element selected from W and Mo; a second element selected from Co, Ni, and Fe; a third element selected from C and B; and a fourth element selected from Al and Mg. The amount of the second element in the thermal spray powder is 20% by mole or greater. The mole ratio of the fourth element to the second element in the thermal spray powder is 0.05 or greater and 0.5 or less. The thermal spray powder has a crystal phase containing Co, Ni, or Fe; W; and C or a crystal phase containing Co, Ni, or Fe; W or Mo; and B. In an X-ray diffraction spectrum of the thermal spray powder, the peak intensity attributed to Co, Ni, or Fe is at most 0.1 times the largest peak intensity in the same X-ray diffraction spectrum.

To provide a slurry for thermal spraying. In the slurry, even when spray particles precipitate, the precipitates easily disappear. The present invention provides a slurry for thermal spraying including spray particles and a dispersion medium. The spray particles have an average circularity in a plan view of 0.85 or less. The spray particles preferably have an average circularity of 0.6 or more. The spray particles may include yttrium fluoride and an yttrium oxyfluoride.

Growing community of inventors

Kiyosu, Japan

Takaya Masuda