National Institute of Advanced Industrial Science and Technology

The University of Tokyo

Nippon Mektron Limited

Takashige Ohsawa

Masayuki Noguchi

Kazuyuki Ozaki

Taisuke Kimura

Yasuo Kuniyoshi

Yoshiyuki Ohmura

Akihiko Nagakubo

Katsuyoshi Iizuka

Takashi Sagisaka

Masatoshi Nakajima

A pressure sensor comprising: a base film on which a conductor pattern having one or more electrodes is formed; a cover film laminated on the base film so as to cover the electrodes of the conductor pattern; and a spacer disposed between the cover film and the base film so as to form a hollow portion having a predetermined gap between the electrode and the cover film; wherein a portion corresponding to the hollow portion of the cover film is constructed such that it has a pressure sensing part which is able to deform in a direction to move toward and away from the electrode in accordance with pressure, and of which contact resistance changes in accordance with a contact pressure thereof with the electrode, so that the pressure sensing part detects the pressure by a change of the contact resistance.

Pressure sensor, method for manufacture thereof, and pressure detection module

Growing community of inventors

Tokyo, Japan

Takashige Ohsawa