Mitsubishi Electric Corporation

Mitsubishi Denki Kabushiki Kaisha

Ryoden Koki Engineering Co., Ltd.

Mitsubishi Electric Engineering Kabushiki Kaisha

Takashi Yuzawa

Takashi Hashimoto

Tatsushi Sato

Hidetaka Miyake

Takuji Magara

Takayuki Nakagawa

Yoshihito Imai

Yoichi Otomo

Tamayo Ohata

Akihiro Goto

Yasuo Onodera

Yoshikazu Ukai

Hironori Kuriki

Hisakatsu Kawarai

Koichiro Hattori

Atsushi Itokazu

Jyunji Tanimura

Masao Akiyoshi

Masahiro Yamamoto

Hiroyuki Kawano

Junichi Shibata

Toshio Moro

Kazuhiko Fukushima

Naoya Tsukamoto

Yoshihide Kinbara

Atsushi Taneda

Mitsuyoshi Wada

Tomoko Sendai

Shigeru Takushima

Manabu Yoshida

Hajime Ogawa

Makito Seki

Hidehiko Tanaka

Kozo Nomura

Yoshinori Asai

A wire electrical discharge machine to cut a workpiece by generating an electrical discharge in a dielectric working fluid between wire electrodes arranged in parallel and the workpiece includes: a work tank that stores the dielectric working fluid; a Z-axis stage that is disposed in a lower portion of the work tank and moves the workpiece in a Z-axis direction that is a vertical direction; a pillar that extends upward from the Z-axis stage and has an upper end portion located above the highest level of a fluid level of the dielectric working fluid in the work tank; an adjuster that is installed downward from a portion of the pillar located above the highest level of the fluid level, is disposed above the highest level of the fluid level, and adjusts the position or posture of the workpiece in a direction other than the vertical direction.

Wire electrical discharge machine

Electric discharge machine

A controller controls cutting of simultaneously cutting wafers by performing electrical discharge machining while moving a workpiece relative to cutting wire sections in a direction at right angles to the cutting wire sections in a plane perpendicular to the axial direction of main guide rollers and leaving a connection at which a part of each wafer that has been incompletely cut is still connected to the workpiece, and shape correction of causing the cutting wire sections to perform scanning while performing electrical discharge machining along a path of the cutting wire sections in a cutting direction at the time of the cutting to simultaneously correct the shape of a plurality of cut surfaces that are cut at the time of the cutting.

Wire electrical discharge machining apparatus and method of manufacturing semiconductor wafer

A displacement sensor includes: a projection unit projecting emitted light toward a detection target surface of a detection target object; an objective optical system converging the emitted light toward the detection target surface and admitting reflected light resulting from diffuse reflection of the emitted light by the detection target surface; a baffle plate having openings each allowing one of portions of transmitted light resulting from the admission by the objective optical system to pass therethrough; an image capture unit capturing an image; image forming optical systems allowing each of the portions of the transmitted light resulting from the admission by the objective optical system to form an image on the image capture unit; and a signal processing unit calculating a distance from the detection target surface based on a luminance centroid of each of spots captured by the image capture unit.

Displacement sensor, displacement detection apparatus, and displacement detection method

A wire electric discharge machining apparatus includes a machining unit that forms a product part by cutting off an outer frame portion from a workpiece and a control device that controls the machining unit. The machining unit machines a first boundary region in a boundary between the outer frame portion and the product part to leave an uncut portion, cuts off the product part from the outer frame portion by machining a second boundary region, which is the uncut portion, and repeats machining for the first/second boundary regions. When n is a natural number equal to or larger than 2, the control device sets, based on a machining state when the first boundary region is machined, different machining conditions as first machining conditions in machining the first boundary region for n-th time and second machining conditions in machining the second boundary region for n-th time.

Wire electric discharge machining apparatus, wire electric discharge machining method, and control device

A wire electric discharge machining apparatus includes a machining unit that forms a product part by cutting off an outer frame portion from a workpiece and a control device that controls the machining unit. The machining unit machines a first boundary region in a boundary between a member to be the outer frame portion and a member to be the product part to leave an uncut portion, cuts off the product part from the outer frame portion by machining a second boundary region, which is the uncut portion, and repeats machining for the first/second boundary regions. The uncut portion has a side crossing a machining direction in machining the second boundary region, and when machining the second boundary region, the control device controls the machining unit to start the machining from the crossing side.

A workpiece retainer retains a workpiece at a time of a cutting process by a wire electric discharge machining device that cuts a workpiece by electric discharge from wire electrodes that are spaced from each other and are arranged in parallel. The workpiece retainer is formed with a fitting portion, into which the workpiece is fitted substantially without any gap, and has an external shape such that at a time of cutting the workpiece retainer together with the workpiece fitted in the fitting portion, a length along the wire electrodes of a portion where the workpiece retainer and the workpiece face the wire electrodes becomes substantially constant during the cutting process of the workpiece.

Workpiece retainer, wire electric discharge machining device, thin-plate manufacturing method, and semiconductor-wafer manufacturing method

The present invention includes a post-cooling temperature sensor that measures a temperature of the machining fluid immediately after being cooled by a cooling device as a post-cooling fluid temperature, and an intra-tank temperature sensor that measures a temperature of the machining fluid in a work tank as an intra-tank fluid temperature, for a cooling control device that controls a fluid temperature of the machining fluid in a wire electric discharge machining apparatus, and the cooling control device has a first temperature-feedback control unit that feeds back the post-cooling fluid temperature into a cooling instruction value as an instruction value for the cooling device, and a second temperature-feedback control unit adjusts the cooling instruction value by feeding back the intra-tank fluid temperature to cause the intra-tank fluid temperature to follow a target temperature.

Wire electric discharge machining apparatus and cooling control device

A wire electric discharge machining apparatus includes a wire electrode, a guide roller that arranges wire electrodes in parallel by winding the wire electrode therearound, a plurality of slidable contact conductors that are in slidable contact with the wire electrodes arranged in parallel, respectively, and a power feeding jig that holds the slidable contact conductors individually and feeds power individually to the wire electrodes arranged in parallel via each of the slidable contact conductors, in which the power feeding jig includes a plurality of reference surfaces that determine a fixing interval between the slidable contact conductors.

Wire electric discharge machining apparatus, wire electric discharge machining method, thin plate manufacturing method, and semiconductor wafer manufacturing method

The liquid-quality adjusting apparatus of the present invention includes: a water purifying part that deionizes a machining liquid; an anticorrosive part that exchanges ions in the machining liquid with anticorrosive ions; a conductivity measuring part that measures a measured value of conductivity of the machining liquid; a storage part that stores in advance a first reference value and a second reference value which are an upper limit value and a lower limit value of conductivity applicable to machining, respectively, and a third reference value which is between the first reference value and the second reference value; and a control part that performs control on the basis of the reference values stored in the storage part and the measured value of the conductivity of the machining liquid measured by the conductivity measuring part.

Liquid-quality adjusting apparatus, liquid-quality adjusting method, and wire electric discharge machining apparatus

Based on a discharging gap value and machining allowance value stored in a corner-control-information storing means, a speed-ratio calculating meansbeing a machining-volume calculating means calculates machining volumes of a straight line portion and a corner portion to calculate a volume ratio therebetween. A corner-portion-speed calculating meanscalculates a machining feed speed at the corner portion based on a volume ratio calculated by the speed-ratio calculating means, and then outputs to a servo amplifieron the basis of the length of a pre-corner section outputted by a pre-corner-section calculating meansand the length of a post-corner section outputted by a post-corner-section calculating means, instructions about machining feed speeds from entering the pre-corner section till getting out of the post-corner section.

Wire electric discharge machine and wire electric discharge machining method

A corrosion preventing apparatus including: a water purifying part that includes a hydrogen-ion form resin and a hydroxy-ion form resin; an anticorrosive part that includes a cation form resin and an anion form resin having anticorrosive ions supported thereon; a conductivity measuring part that measures a measured value of conductivity of a machining liquid; and a control part that controls a flow of the machining liquid to the water purifying part and the anticorrosive part on the basis of the conductivity measuring part; wherein the control part performs control on the basis of predetermined first and second conductivities and the measured value measured by the conductivity measuring part.

Corrosion preventing apparatus, corrosion preventing method, and wire electric discharge machining apparatus

An object is to enable highly accurate machining by correcting machining conditions by referring to a programmed trajectory to obtain a desired machining shape. A wire electric discharge machining apparatus includes a machining-condition correcting unit that corrects machining conditions in each machining stage corresponding to a circular arc radius of a portion corresponding to a corner portion of a programmed trajectory, in the corner portion formed by changing a direction of relatively moving a wire electrode, when the wire electrode is moved on a wire center trajectory, which is offset from the programmed trajectory prestored in order to obtain a desired machining shape to perform finish machining in each machining stage with an offset amount being changed.

Wire electric discharge machining apparatus

An electric discharge machining device that performs processing by applying a voltage pulse to space between the processing electrode and the workpiece and suitably switching the polarity of the voltage pulse attains both desired processing accuracy and desired controllability. The electric discharge machining device is provided with the first to fourth switching elements. The controlling unit that controls these switching elements, when setting a period time in which the first switching element is turned on, a period of time in which the fourth switching element is in an on-state in the same period, and, when setting a period time in which the second switching element is turned on, a period of time in which the third switching element is in an on-state in the same period so that a desired voltage pulse is applied to the space between the processing electrode and the workpiece.

Electric discharge machining device that applies a voltage pulse between a processing electrode and a workpiece

In a waveform of switching signals, which is output from a full-bridge circuit formed of four switching elements, includes a normal polarity pulse group and a reversed polarity pulse group for controlling an output timing of voltage pulses. A duty cycle of the normal polarity pulse group containing a plurality of normal polarity pulses, which apply a positive power-supply polarity to a workpiece and apply a negative power-supply polarity to a machining-purpose electrode, is configured so as to be different from a duty cycle of the reversed polarity pulse group containing a plurality of reversed polarity pulses, which apply a negative power-supply polarity to the workpiece and apply a positive power-supply polarity to the machining-purpose electrode.

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Tokyo, Japan

Takashi Yuzawa