Yokogawa Electric Corporation

Takashi Yoshida

Yuusaku Yoshida

Atsushi Yumoto

Shigeto Iwai

Yoshitaka Suzuki

Kenta Mikuriya

Makoto Noro

Hiroshi Suzuki

Yasuhito Kosugi

Shuhei Yoshita

Hisashi Terashita

Yoshitaka Sasaki

Shuuji Okuda

A resonant pressure sensor includes a first substrate and a resonator. The first substrate includes a diaphragm and a projection disposed on the diaphragm. The resonator is disposed in the first substrate, a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate. The first substrate is an SOI substrate in which a silicon dioxide layer is inserted between a silicon substrate and a superficial silicon layer. The intermediate level of the first substrate is disposed in the silicon substrate, and the resonator is disposed in the projection included in the superficial silicon layer.

Resonant pressure sensor and manufacturing method therefor

A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate.

A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.

Resonant transducer and manufacturing method of resonant transducer

A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole, a second layer disposed over the first layer, a third layer covering the first layer and the second layer, and a projection extending from the second layer toward the resonator, the projection being spatially separated from the resonator, the projection being separated from the first layer by a first gap, the second layer being separated from the first layer by a second gap, the first gap is communicated with the second gap.

Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer

A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm may include a sensor substrate made of silicon and including one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm, a base substrate made of silicon and including one surface directly bonded with the other surface of the sensor substrate, a concave portion formed in a portion of the base substrate bonding with the sensor substrate, substantially forming the diaphragm in the sensor substrate, and including a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements, one or more conducting holes, and a fluid.

Resonant pressure sensor and method of manufacturing the same

There is achieved a confocal scanner capable of being adjusted can be achieved with ease so as to be in a well-balanced state where a utilization ratio of an excited light is high and light quantity distribution on the cross-section of beams is excellent in evenness even in the case of being coupled with an optical fiber varying in a beam spread-angle. The confocal scanner is provided with a collimator lens for causing beams outgoing from an emission end of an optical fiber for guiding an excited light, with a predetermined spread-angle, to be converted into collimated beams before falling on a microlens disk, wherein a beam spread-angle adjusting means for adjusting the spread-angle is provided between the emission end, and the collimator lens.

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Musashino, Japan

Takashi Yoshida