Namco Limited

Tokyo Electron Limited

Kabushiki Kaisha Toshiba

Takashi Yokota

Hiroyuki Murata

Katsuhiro Miura

Koichi Sakamoto

Isahiro Hasegawa

Wenling Wang

Fujio Suzuki

Haruo Okano

Yuichi Takenaga

Masaki Takeda

Shiro Koyama

Kazuhiro Kawamura

Osamu Kamikanda

Kuniyuki Konishi

A thermal processing method selects a batch size range including the number of workpieces to be processed from a plurality of batch size ranges including batch size ranges in which reference numbers smaller than the holding capacity of a workpiece holder are maximums. The workpieces are distributed in the workpiece holder on the basis of the workpiece distribution pattern determined corresponding to the specified batch size range. Processing conditions of the thermal process are determined according to the workpiece distribution pattern. A thermal processing apparatus comprises a controller capable of carrying out the thermal processing method.

Heat treatment method and heat treatment device

A heat treatment apparatus has a controller () provided with a temperature estimator () for estimating a temperature of a wafer by detection signals of temperature sensors (Sin, Sout) and a temperature calibrator () for correcting the estimated temperature of the wafer. In order to calibrate the temperature, an offset value stored in an offset table () is used. The offset value is determined based on the relationship between film-thickness of films formed in an experimental heat treatment process and process temperatures.

Heat treatment apparatus, calibration method for temperature measuring system of the apparatus, and heat treatment system

A heat treatment apparatus has a controller ( ) provided with a temperature estimator ( ) for estimating a temperature of a wafer by detection signals of temperature sensors (Sin, Sout) and a temperature calibrator ( ) for correcting the estimated temperature of the wafer. In order to calibrate the temperature, an offset value stored in an offset table ( ) is used. The offset value is determined based on the relationship between film-thickness of films formed in an experimental heat treatment process and process temperatures.

An image synthesizing system is provided which can output a high-quality image in real time through the texture mapping without preventing the hardware from being increased in speed and reduced in scale. A 3-D image is formed by a game space processing unit (,) and image supply unit (,) to perform a 3-D computation. At a processor unit (,), coordinates for each dot in a polygon and the corresponding texture coordinates are determined. A field buffer unit (,) stores the texture coordinates at an address specified by the coordinates for each dot. A texture data storage unit (,) has stored a rendering data. The texture coordinates are read out from the field buffer unit (,) and then used to read out the rendering data from the texture coordinate storage unit (,) to synthesize and output a pseudo 3-D image. By thus storing the texture coordinates in the field buffer unit (,), the subsampling/interpolation and the like may be carried out.

Image synthesizing system with texture mapping

A character screen information generating unit (34) has a function also serving as a spotlight information generating unit and outputs spotlight information for brightness toward a brightness information converting unit (30). The brightness information converting unit (30) uses this spotlight information for brightness to convert brightness information. A shading computation unit (24) uses the converted brightness information and color information of an object to determine color information to be displayed on a display at each pixel. A depth cueing computation unit (26) uses depth information to make a depth cueing computation relative to the determined color information. Thus, a pattern such as headlight can be displayed in the form of spotlight. Further, such a spotlight display can reflect by the depth information. There may further be provided a depth information converting unit for converting the depth information by the use of spotlight information for depth.

Apparatus and method of image synthesization

Lookup table device and signal conversion method

An image synthesizing system is provided which can output a high-quality image in real time through the texture mapping without preventing the hardware from being increased in speed and reduced in scale. A 3-D image is formed by a game space processing unit (13) and image supply unit (10) to perform a 3-D computation. At a processor unit (30), coordinates for each dot in a polygon and the corresponding texture coordinates are determined. A field buffer unit (40) stores the texture coordinates at an address specified by the coordinates for each dot. A texture data storage unit (42) has stored a rendering data. The texture coordinates are read out from the field buffer unit (40) and then used to read out the rendering data from the texture coordinate storage unit (42) to synthesize and output a pseudo 3-D image. By thus storing the texture coordinates in the field buffer unit (40), the subsampling/interpolation and the like may be carried out.

Image synthesizing system

An image synthesizing system capable of synthesizing a high-quality image in real time is provided herein. The image synthesizing system is adapted to process a plurality of overlapping polygons sequentially starting from the closest polygon to the view point in a scene. An end flag storage unit stores an end flag at an address corresponding to the processed dot. A processing dot instruction unit reads out this end flag which in turn is used to indicate a dot to be processed to a processor unit. In such a case, the processing dot instruction unit instructs the processor unit so that the end flag of the dot decided to be processed is written back into the end flag storage unit while at the same time only the dot to be processed is treated. Thus, the image synthesization can sequentially be carried out to the polygons starting from the closest polygon to the view point in the scene. At the same time, the computing process to the hidden portion of polygons which have been processed can be omitted.

Image synthesizing system for producing three-dimensional images

An image synthesizing system improves perspective transformation of images by giving a far and near sense to the spatial change in the surface data of an object. A texture data storage unit stores texture data at positions represented by texture coordinates. An image supply unit outputs texture coordinates, brightness data, attribute data and the other data which correspond to the vertex coordinates arid vertices of polygons. A processor unit determines rendering data for each dot by subjecting the texture coordinates and brightness data to the perspective transformation, linear interpolation and inversely perspective transformation. The resulting rendering data is then mapped to representing coordinates determined by a main processor in a field buffer unit. Thereafter, the rendering data is transformed into RGB data by a palette/mixer circuit using color data which are read out from a texture data storage unit by the texture coordinates, attribute data and brightness data. Thus, an image data can be formed.

Image synthesizing system with surface data perspective transformation

Image synthesizing system having a field buffer unit that stores texture

A pressure gage detects a pressure in a vacuum-processing container as an electrical signal. A pressure detection signal from the pressure gage includes an error over time. An error detecting unit detects a signal representing the error which is output from the pressure gage while the vacuum-processing container is set at a predetermined calibration pressure. A correction value calculating unit calculates, in accordance with the signal representing the error which is detected by the error detecting unit, a signal representing a correction value used in order to cancel the signal representing the error. A correcting unit adds the pressure detection signal from the pressure gage to the signal representing the correction value which is calculated by the correction value calculating unit while an instruction for setting an interior of the vacuum-processing container at a desired pressure value is output, thereby eliminating the error over time which is included in the pressure detection signal. A pressure controlling unit controls the interior of the vacuum-processing container at the desired pressure value in accordance with an output signal from which the error over time has been eliminated by the correcting unit.

Plasma processing apparatus using capacitance manometer and pressure

A plasma generating section generates a plasma in a process vessel. A plasma process section executes a plasma process to a substance to be processed by moving the plasma generated by the plasma generating section. A sensor section outputs an electrical signal corresponding to the intensity of plasma light having a predetermined wavelength in the plasma when the plasma process is executed by the plasma process section. A smoothing section smooths the electrical signal output from the sensor section. A end-point detecting section detects an end-point of the plasma process in accordance with the signal smoothed by the smoothing section.

Plasma apparatus

A plasma processing apparatus includes a plasma processing section and a control section for controlling an operation of a driving system of the processing section. The control section includes a CPU, arranged to be separated from the plasma processing section, for outputting a digital control signal to the driving system of the plasma processing section, a first converter, arranged on the CPU side, for converting a parallel signal from the CPU into a serial signal, a second converter, arranged on the processing section side, for converting the serial signal from the first converter into a parallel signal and outputting the parallel signal to the processing section, a cable for transmitting a serial signal between the first converter and the second converter, and a timing control circuit for controlling timings of transmission/reception signals of the first and second converters.

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Yokohama, Japan

Takashi Yokota